Shutdown asml SNF 2012-05-22 15:42:18: Shutdown 5/22

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Tue May 22 15:42:19 PDT 2012


The stepper will be shutdown overning due to critical metrology setups in progress. The tool is in an uncalibrated state and not ready for wafer processing. ASML vendors will continue with setups tomorrow(5/23).




More information about the asml-pcs mailing list