Shutdown asml SNF 2012-05-23 16:10:07: Shutdown 5/23

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Wed May 23 16:10:08 PDT 2012


The stepper is still shut down. The ASML vendors are doing some critical setups to the alignmnet system. They will need to bring in some additional tooling to adjust the reticle table tilt. Stepper is not in a working state. ASML to continue work tomorrow.




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