Problem asml SNF 2012-05-25 17:41:48: Leveling problem 5/25

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Fri May 25 17:43:35 PDT 2012


Had to reset the wafer stage rack and LC rack and did a fresh unix restart. Cleaned the E-chuck and checked with hotspot test- OK. Cycled wafers through the tool - All OK.




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