May 2012 Archives by thread

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Starting: Tue May 1 18:34:54 PDT 2012
Ending: Thu May 31 11:36:50 PDT 2012
Messages: 34

• Shutdown asml SNF 2012-04-27 15:09:00: Tool Shutdown 4/27   gsosa at snf.stanford.edu
• Comment asml SNF 2012-05-01 18:35:48: Up for frontside align Only 5/1   gsosa at snf.stanford.edu
• Comment asml SNF 2012-05-02 19:57:45: wafer hood broken   maxms at snf.stanford.edu
  • Comment asml SNF 2012-05-02 19:57:45: wafer hood broken   gsosa at snf.stanford.edu
• Shutdown asml SNF 2012-05-03 09:28:38: Shutdown 5/3   gsosa at snf.stanford.edu
  • Shutdown asml SNF 2012-05-03 09:28:38: Shutdown 5/3   gsosa at snf.stanford.edu
• Shutdown asml SNF 2012-05-03 12:37:04: 3D Align Setup 5/3   gsosa at snf.stanford.edu
  • Shutdown asml SNF 2012-05-03 12:37:04: 3D Align Setup 5/3   gsosa at snf.stanford.edu
• Comment asml SNF 2012-05-03 15:59:41: Front and backside align OK 5/3   gsosa at snf.stanford.edu
• Problem asml SNF 2012-04-20 21:25:21: batch did not finish due to system error   gsosa at snf.stanford.edu
• Problem asml SNF 2012-04-20 17:11:23: Frontside align only 4/20   gsosa at snf.stanford.edu
• Problem asml SNF 2012-05-03 16:02:39: No thick resist processing   gsosa at snf.stanford.edu
• Comment asml SNF 2012-05-03 17:36:19: Tried BSA -- largely fine, minor hiccups   bchui at snf.stanford.edu
• Problem asml SNF 2012-05-06 17:16:19:   insun at snf.stanford.edu
  • Problem asml SNF 2012-05-06 17:16:19:   vilanova at snf.stanford.edu
• Problem asml SNF 2012-05-06 17:30:21: ASML software frozen   ysohn at snf.stanford.edu
  • Problem asml SNF 2012-05-06 17:30:21: ASML software frozen   vilanova at snf.stanford.edu
• Comment asml SNF 2012-05-11 09:34:56: ASML Released Reservatins 10:00-14:00   lindaohara at snf.stanford.edu
• Shutdown asml SNF 2012-05-11 18:13:24: Wafer lost inside machine   bchui at snf.stanford.edu
  • Shutdown asml SNF 2012-05-11 18:13:24: Wafer lost inside machine   gsosa at snf.stanford.edu
• Problem asml SNF 2012-05-22 15:41:22: Shutdown 5/22   gsosa at snf.stanford.edu
  • Problem asml SNF 2012-05-22 15:41:22: Shutdown 5/22   pding at snf.stanford.edu
• Shutdown asml SNF 2012-05-22 15:42:18: Shutdown 5/22   gsosa at snf.stanford.edu
  • Shutdown asml SNF 2012-05-22 15:42:18: Shutdown 5/22   pding at snf.stanford.edu
• Shutdown asml SNF 2012-05-23 16:10:07: Shutdown 5/23   gsosa at snf.stanford.edu
  • Shutdown asml SNF 2012-05-23 16:10:07: Shutdown 5/23   pding at snf.stanford.edu
• Problem asml SNF 2012-05-24 14:55:38: Backside is not up yet   pding at snf.stanford.edu
  • Problem asml SNF 2012-05-24 14:55:38: Backside is not up yet   pding at snf.stanford.edu
• Comment asml SNF 2012-05-25 12:46:33: 3DAlign is up   pding at snf.stanford.edu
• Problem asml SNF 2012-05-25 17:41:48: Leveling problem 5/25   gsosa at snf.stanford.edu
  • Problem asml SNF 2012-05-25 17:41:48: Leveling problem 5/25   gsosa at snf.stanford.edu
• Comment asml SNF 2012-05-29 09:50:51: Hotspot Found On Lower right hand corner   vilanova at snf.stanford.edu
• Comment asml SNF 2012-05-30 09:58:46: ASML Released Reservations 11:00-14:00   lindaohara at snf.stanford.edu
• Comment asml SNF 2012-05-31 11:36:49: ASML Released Reservations 12:00-14:00   lindaohara at snf.stanford.edu

Last message date: Thu May 31 11:36:50 PDT 2012
Archived on: Sun Dec 23 08:44:27 PST 2012

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