From mnakamura at snf.stanford.edu Fri Feb 1 13:21:54 2013 From: mnakamura at snf.stanford.edu (mnakamura at snf.stanford.edu) Date: Fri, 1 Feb 2013 13:21:54 -0800 (PST) Subject: [asml-pcs] Comment asml SNF 2013-02-01 13:21:54: Released ASML - 13:30 to 14:30 today (02-01-2013) Message-ID: <23477492.16.1359753714954.JavaMail.coral@snc-coraldb.stanford.edu> Released ASML - 13:30 to 14:30 today (02-01-2013) From nisarga at gmail.com Fri Feb 1 17:33:23 2013 From: nisarga at gmail.com (nisarga at gmail.com) Date: Fri, 1 Feb 2013 17:33:23 -0800 (PST) Subject: [asml-pcs] Comment asml SNF 2013-02-01 17:33:23: focus spot error Message-ID: <27029544.22.1359768803739.JavaMail.coral@snc-coraldb.stanford.edu> I processed 2 wafers and both were accepted. Received a focus spot error on one of the wafers. From vilanova at stanford.edu Mon Feb 4 09:22:00 2013 From: vilanova at stanford.edu (vilanova at stanford.edu) Date: Mon, 4 Feb 2013 09:22:00 -0800 (PST) Subject: [asml-pcs] Comment asml SNF 2013-02-04 09:22:00: Found a Hotspot On the wafer Top Left hand side Message-ID: <32827149.32.1359998520588.JavaMail.coral@snc-coraldb.stanford.edu> Found a Hotspot On the wafer Top Left hand side, Cleaned Echuck With Tooling, Tested Ok, All Operations are Ok, Good to use. From vilanova at stanford.edu Wed Feb 6 09:05:28 2013 From: vilanova at stanford.edu (vilanova at stanford.edu) Date: Wed, 6 Feb 2013 09:05:28 -0800 (PST) Subject: [asml-pcs] Comment asml SNF 2013-02-06 09:05:28: I, m Releasing the rest of our reservations From 9:00Am to 2:00PM Message-ID: <5950816.77.1360170328875.JavaMail.coral@snc-coraldb.stanford.edu> I,m Releasing the rest of our reservations From 9:00Am to 2:00PM WE ' VE FINISH earlier. From vilanova at stanford.edu Fri Feb 8 13:15:08 2013 From: vilanova at stanford.edu (vilanova at stanford.edu) Date: Fri, 8 Feb 2013 13:15:08 -0800 (PST) Subject: [asml-pcs] Comment asml SNF 2013-02-08 13:15:08: Found a hotspot on top Edge of wafer Message-ID: <30200153.10.1360358108693.JavaMail.coral@snc-coraldb.stanford.edu> Found a hotspot on top Edge of wafer, cleaned E chuck with tooling cycled tested wafers, No more hotspot , all operations Ok I,m Removing the rest of the reservations time, Ok to use. From sipark at stanford.edu Sun Feb 10 20:55:09 2013 From: sipark at stanford.edu (sipark at stanford.edu) Date: Sun, 10 Feb 2013 20:55:09 -0800 (PST) Subject: [asml-pcs] Problem asml SNF 2013-02-10 20:55:09: Port 4 cover backside broken Message-ID: <7441349.32.1360558509540.JavaMail.coral@snc-coraldb.stanford.edu> From alsune at stanford.edu Sun Feb 10 22:26:11 2013 From: alsune at stanford.edu (alsune at stanford.edu) Date: Sun, 10 Feb 2013 22:26:11 -0800 (PST) Subject: [asml-pcs] Problem asml SNF 2013-02-10 22:26:10: Output box cover hinge loose Message-ID: <14758965.33.1360563971318.JavaMail.coral@snc-coraldb.stanford.edu> Upon retrieving the samples after exposure, noticed the hinge part of the cover was broken. Not sure when it happened but was in that state when I opened it. From gsosa at stanford.edu Mon Feb 11 12:09:35 2013 From: gsosa at stanford.edu (gsosa at stanford.edu) Date: Mon, 11 Feb 2013 12:09:35 -0800 (PST) Subject: [asml-pcs] Problem asml SNF 2013-02-10 20:55:09: Port 4 cover backside broken Message-ID: <17532242.53.1360613375677.JavaMail.coral@snc-coraldb.stanford.edu> Replaced the hinges on the port cover on port #3( Output) From gsosa at stanford.edu Mon Feb 11 12:09:39 2013 From: gsosa at stanford.edu (gsosa at stanford.edu) Date: Mon, 11 Feb 2013 12:09:39 -0800 (PST) Subject: [asml-pcs] Problem asml SNF 2013-02-10 22:26:10: Output box cover hinge loose Message-ID: <16954606.54.1360613379697.JavaMail.coral@snc-coraldb.stanford.edu> Replaced the hinges on the port cover on port #3( Output) From gsosa at stanford.edu Tue Feb 12 07:42:58 2013 From: gsosa at stanford.edu (gsosa at stanford.edu) Date: Tue, 12 Feb 2013 07:42:58 -0800 (PST) Subject: [asml-pcs] Comment asml SNF 2012-11-14 08:55:02: Hotspot 11/14 Message-ID: <21711674.19.1360683778643.JavaMail.coral@snc-coraldb.stanford.edu> To Archive From gsosa at stanford.edu Tue Feb 12 07:43:03 2013 From: gsosa at stanford.edu (gsosa at stanford.edu) Date: Tue, 12 Feb 2013 07:43:03 -0800 (PST) Subject: [asml-pcs] Comment asml SNF 2012-11-21 09:10:19: Hotspot Found at top left hand side of wafer. Message-ID: <27104945.20.1360683783666.JavaMail.coral@snc-coraldb.stanford.edu> To Archive From gsosa at stanford.edu Tue Feb 12 07:43:15 2013 From: gsosa at stanford.edu (gsosa at stanford.edu) Date: Tue, 12 Feb 2013 07:43:15 -0800 (PST) Subject: [asml-pcs] Comment asml SNF 2012-11-30 13:31:26: Message-ID: <29059689.21.1360683795702.JavaMail.coral@snc-coraldb.stanford.edu> To Archive From gsosa at stanford.edu Tue Feb 12 07:43:21 2013 From: gsosa at stanford.edu (gsosa at stanford.edu) Date: Tue, 12 Feb 2013 07:43:21 -0800 (PST) Subject: [asml-pcs] Comment asml SNF 2012-11-30 13:34:56: ASML ready to use Message-ID: <10037029.22.1360683801727.JavaMail.coral@snc-coraldb.stanford.edu> To Archive From gsosa at stanford.edu Tue Feb 12 07:43:33 2013 From: gsosa at stanford.edu (gsosa at stanford.edu) Date: Tue, 12 Feb 2013 07:43:33 -0800 (PST) Subject: [asml-pcs] Comment asml SNF 2012-12-04 12:42:17: ASML Released Reservations until 14:00 Message-ID: <27813000.23.1360683813765.JavaMail.coral@snc-coraldb.stanford.edu> To Archive From gsosa at stanford.edu Tue Feb 12 07:43:36 2013 From: gsosa at stanford.edu (gsosa at stanford.edu) Date: Tue, 12 Feb 2013 07:43:36 -0800 (PST) Subject: [asml-pcs] Comment asml SNF 2012-12-06 11:58:54: ASML Released Reservations 12:00-14:00 Message-ID: <5437246.24.1360683816784.JavaMail.coral@snc-coraldb.stanford.edu> To Archive From gsosa at stanford.edu Tue Feb 12 07:43:44 2013 From: gsosa at stanford.edu (gsosa at stanford.edu) Date: Tue, 12 Feb 2013 07:43:44 -0800 (PST) Subject: [asml-pcs] Comment asml SNF 2012-12-07 08:19:56: SNF Reticle SMIF Pod Open Message-ID: <27806520.25.1360683824813.JavaMail.coral@snc-coraldb.stanford.edu> To Archive From gsosa at stanford.edu Tue Feb 12 07:43:49 2013 From: gsosa at stanford.edu (gsosa at stanford.edu) Date: Tue, 12 Feb 2013 07:43:49 -0800 (PST) Subject: [asml-pcs] Comment asml SNF 2012-12-12 08:36:59: No Hotspots During Quals Message-ID: <16685777.26.1360683829836.JavaMail.coral@snc-coraldb.stanford.edu> To Archive From gsosa at stanford.edu Tue Feb 12 07:44:00 2013 From: gsosa at stanford.edu (gsosa at stanford.edu) Date: Tue, 12 Feb 2013 07:44:00 -0800 (PST) Subject: [asml-pcs] Comment asml SNF 2012-12-13 11:08:01: ASML Released Reservations 11:30-14:00 Message-ID: <12159494.27.1360683840872.JavaMail.coral@snc-coraldb.stanford.edu> To Archive From gsosa at stanford.edu Tue Feb 12 07:44:06 2013 From: gsosa at stanford.edu (gsosa at stanford.edu) Date: Tue, 12 Feb 2013 07:44:06 -0800 (PST) Subject: [asml-pcs] Comment asml SNF 2013-01-18 15:47:25: Update 1/18 Message-ID: <27799186.28.1360683846897.JavaMail.coral@snc-coraldb.stanford.edu> To Archive From gsosa at stanford.edu Tue Feb 12 09:50:03 2013 From: gsosa at stanford.edu (gsosa at stanford.edu) Date: Tue, 12 Feb 2013 09:50:03 -0800 (PST) Subject: [asml-pcs] Shutdown asml SNF 2013-02-12 09:50:02: TCU Problem 2/12 Message-ID: <19474866.37.1360691403913.JavaMail.coral@snc-coraldb.stanford.edu> The TCU is faulting and going into "Safety " mode. Tried restarting C&T twice. No luck. Contacted ASML field service. They will try to send someone out to fix the problem. From gsosa at stanford.edu Tue Feb 12 14:34:42 2013 From: gsosa at stanford.edu (gsosa at stanford.edu) Date: Tue, 12 Feb 2013 14:34:42 -0800 (PST) Subject: [asml-pcs] Shutdown asml SNF 2013-02-12 09:50:02: TCU Problem 2/12 Message-ID: <1875105.58.1360708482742.JavaMail.coral@snc-coraldb.stanford.edu> There was a process cooling water and CDA problem in the building. All facilities restored. Stepper C&T restarted and system is stabilized. From gsosa at stanford.edu Wed Feb 13 15:33:44 2013 From: gsosa at stanford.edu (gsosa at stanford.edu) Date: Wed, 13 Feb 2013 15:33:44 -0800 (PST) Subject: [asml-pcs] Problem asml SNF 2013-02-13 15:33:44: Silicon Wafers Only Message-ID: <22459914.73.1360798424225.JavaMail.coral@snc-coraldb.stanford.edu> System is up for silicon wafers only. Do not process any transparent wafers( quartz/glass). ASML needs to calibrate the edge detector. From mnakamura at snf.stanford.edu Fri Feb 15 10:25:51 2013 From: mnakamura at snf.stanford.edu (mnakamura at snf.stanford.edu) Date: Fri, 15 Feb 2013 10:25:51 -0800 (PST) Subject: [asml-pcs] Problem asml SNF 2013-02-13 15:33:44: Silicon Wafers Only Message-ID: <14774907.111.1360952751959.JavaMail.coral@snc-coraldb.stanford.edu> calibrated the edge sensor, now okay to run glass/quartz substrates. From ylyang at stanford.edu Fri Feb 15 17:54:48 2013 From: ylyang at stanford.edu (ylyang at stanford.edu) Date: Fri, 15 Feb 2013 17:54:48 -0800 (PST) Subject: [asml-pcs] Shutdown asml SNF 2013-02-15 17:54:48: Wafer stucked in the machine Message-ID: <18915181.134.1360979688269.JavaMail.coral@snc-coraldb.stanford.edu> My wafers were stucked in the machine. Sorry for the inconvenient to all the lab members. gary, I left my box and twizzers on the table. Please put my wafer in the box. By the way, Could you let me know when will you go to snf. I would like to be around. Best, Yongliang From gsosa at stanford.edu Fri Feb 15 22:20:38 2013 From: gsosa at stanford.edu (gsosa at stanford.edu) Date: Fri, 15 Feb 2013 22:20:38 -0800 (PST) Subject: [asml-pcs] Shutdown asml SNF 2013-02-15 17:54:48: Wafer stucked in the machine Message-ID: <3379269.135.1360995638565.JavaMail.coral@snc-coraldb.stanford.edu> Retrieved the users stranded wafers from the machine. Tested wafer handling with test job and wafers. ALL OK. From kosar at genapsys.com Mon Feb 18 22:43:20 2013 From: kosar at genapsys.com (kosar at genapsys.com) Date: Mon, 18 Feb 2013 22:43:20 -0800 (PST) Subject: [asml-pcs] Problem asml SNF 2013-02-18 22:43:20: ASML shut down :( Message-ID: <33031146.149.1361256200108.JavaMail.coral@snc-coraldb.stanford.edu> I had one wafer running into ASML, last time it was seen in E-chuck and then ASML lost it. Sorry about the inconvenience. From kosar at genapsys.com Mon Feb 18 22:43:41 2013 From: kosar at genapsys.com (kosar at genapsys.com) Date: Mon, 18 Feb 2013 22:43:41 -0800 (PST) Subject: [asml-pcs] Shutdown asml SNF 2013-02-18 22:43:40: Message-ID: <15075866.150.1361256221204.JavaMail.coral@snc-coraldb.stanford.edu> From gsosa at stanford.edu Tue Feb 19 09:21:14 2013 From: gsosa at stanford.edu (gsosa at stanford.edu) Date: Tue, 19 Feb 2013 09:21:14 -0800 (PST) Subject: [asml-pcs] Shutdown asml SNF 2013-02-18 22:43:40: Message-ID: <1646031.156.1361294474347.JavaMail.coral@snc-coraldb.stanford.edu> Removed users wafer from E-chuck. Cleaned the e-chuck with tooling. Performed daily qual and tested system operation. All OK. Wafer to be evaluated by ASML Apps group to determine failure mode. From gsosa at stanford.edu Tue Feb 19 09:21:21 2013 From: gsosa at stanford.edu (gsosa at stanford.edu) Date: Tue, 19 Feb 2013 09:21:21 -0800 (PST) Subject: [asml-pcs] Problem asml SNF 2013-02-18 22:43:20: ASML shut down :( Message-ID: <13037652.157.1361294481375.JavaMail.coral@snc-coraldb.stanford.edu> Removed users wafer from E-chuck. Cleaned the e-chuck with tooling. Performed daily qual and tested system operation. All OK. Wafer to be evaluated by ASML Apps group to determine failure mode. From mnakamura at snf.stanford.edu Tue Feb 19 13:26:20 2013 From: mnakamura at snf.stanford.edu (mnakamura at snf.stanford.edu) Date: Tue, 19 Feb 2013 13:26:20 -0800 (PST) Subject: [asml-pcs] Comment asml SNF 2013-02-19 13:26:20: Released ASML - 13:30 to 14:30 today (02-19-2013) Message-ID: <23837312.170.1361309180584.JavaMail.coral@snc-coraldb.stanford.edu> Released ASML - 13:30 to 14:30 today (02-19-2013) From vilanova at stanford.edu Wed Feb 20 09:39:16 2013 From: vilanova at stanford.edu (vilanova at stanford.edu) Date: Wed, 20 Feb 2013 09:39:16 -0800 (PST) Subject: [asml-pcs] Comment asml SNF 2013-02-20 09:39:15: Found A Hotspot during Daily quals Message-ID: <315305.24.1361381956457.JavaMail.coral@snc-coraldb.stanford.edu> Found a hotspot during daily quals, RIght top hand side of wafer, Cleaned E chuck , tested with tooling, Ok to use From gsosa at stanford.edu Fri Feb 22 14:40:36 2013 From: gsosa at stanford.edu (gsosa at stanford.edu) Date: Fri, 22 Feb 2013 14:40:36 -0800 (PST) Subject: [asml-pcs] Comment asml SNF 2013-02-22 14:40:36: Lamp change 2/22 Message-ID: <20247172.53.1361572836994.JavaMail.coral@snc-coraldb.stanford.edu> UV lamp replaced by ASML. . From ajsnfconsult at gmail.com Fri Feb 22 19:20:03 2013 From: ajsnfconsult at gmail.com (ajsnfconsult at gmail.com) Date: Fri, 22 Feb 2013 19:20:03 -0800 (PST) Subject: [asml-pcs] Problem asml SNF 2013-02-22 19:20:03: Software is frozen Message-ID: <9087285.69.1361589603142.JavaMail.coral@snc-coraldb.stanford.edu> I was in the batch control menu inputting my exposure parameters and when I hit "enter" the software switched over to the main menu. The cursor is frozen in the "clock" appearance and I can't get back into batch control. I was able to get into Material handling and unload my reticle, but can't log out. screen is stuck in Main Menu, you can go into Material Handling but nothing else, you can't exit. There is a message in the Right hand screen that says "BC_Server_6 was terminated unexpectedly" and 'error occured in CNXAselect'. There are no wafers in the machine. It looks like the software needs a re-boot but I don't know how to do that so I'm leaving it as is. From mnakamura at snf.stanford.edu Sun Feb 24 14:03:05 2013 From: mnakamura at snf.stanford.edu (mnakamura at snf.stanford.edu) Date: Sun, 24 Feb 2013 14:03:05 -0800 (PST) Subject: [asml-pcs] Problem asml SNF 2013-02-22 19:20:03: Software is frozen Message-ID: <12360885.79.1361743385489.JavaMail.coral@snc-coraldb.stanford.edu> Restarted the stepper application software, and ran a test batch successfully. There is a wafer in the input cassette. From gsosa at stanford.edu Tue Feb 26 09:42:51 2013 From: gsosa at stanford.edu (gsosa at stanford.edu) Date: Tue, 26 Feb 2013 09:42:51 -0800 (PST) Subject: [asml-pcs] Comment asml SNF 2013-02-26 09:42:51: Reservations Released 2/26 Message-ID: <5191047.45.1361900571932.JavaMail.coral@snc-coraldb.stanford.edu> ASML reservations released for the remainder of the day. Tool is available for use. From vilanova at stanford.edu Wed Feb 27 10:01:09 2013 From: vilanova at stanford.edu (vilanova at stanford.edu) Date: Wed, 27 Feb 2013 10:01:09 -0800 (PST) Subject: [asml-pcs] Comment asml SNF 2013-02-27 10:01:09: We 've finished early i, m realising the rest of our reservations Message-ID: <33387796.83.1361988069750.JavaMail.coral@snc-coraldb.stanford.edu> We finished early i,m realising the rest of our reservations From gsosa at stanford.edu Thu Feb 28 14:06:06 2013 From: gsosa at stanford.edu (gsosa at stanford.edu) Date: Thu, 28 Feb 2013 14:06:06 -0800 (PST) Subject: [asml-pcs] Comment asml SNF 2013-02-28 14:06:06: Reservations Released 2/28 Message-ID: <26362458.0.1362089166834.JavaMail.coral@snc-coraldb.stanford.edu> ASML Field Service is done with the tool . Tool is available for use.