From gsosa at stanford.edu Fri Jan 11 16:58:25 2013 From: gsosa at stanford.edu (gsosa at stanford.edu) Date: Fri, 11 Jan 2013 16:58:25 -0800 (PST) Subject: [asml-pcs] Shutdown asml SNF 2013-01-07 08:11:02: Startup Failure Message-ID: <21042659.61.1357952305375.JavaMail.coral@snc-coraldb.stanford.edu> FSE's troubleshot and replaced remote reset PC board in the MVR electronics rack. System was allowed to stabilize. Critical metrology and handling tests performed and updates made as needed. Checked hotspot and E/O on both developer tracks-OK. System is up for frontside align only. Backside align is not qualified yet. Will be calibrated next week. From gsosa at stanford.edu Fri Jan 11 16:58:31 2013 From: gsosa at stanford.edu (gsosa at stanford.edu) Date: Fri, 11 Jan 2013 16:58:31 -0800 (PST) Subject: [asml-pcs] Comment asml SNF 2013-01-08 07:22:32: Update 1/8 Message-ID: <17305650.62.1357952311402.JavaMail.coral@snc-coraldb.stanford.edu> FSE's troubleshot and replaced remote reset PC board in the MVR electronics rack. System was allowed to stabilize. Critical metrology and handling tests performed and updates made as needed. Checked hotspot and E/O on both developer tracks-OK. System is up for frontside align only. Backside align is not qualified yet. Will be calibrated next week. From gsosa at stanford.edu Fri Jan 11 16:59:29 2013 From: gsosa at stanford.edu (gsosa at stanford.edu) Date: Fri, 11 Jan 2013 16:59:29 -0800 (PST) Subject: [asml-pcs] Problem asml SNF 2013-01-11 16:59:28: Frontside align only 1/11/13 Message-ID: <31412387.63.1357952369528.JavaMail.coral@snc-coraldb.stanford.edu> FSE's troubleshot and replaced remote reset PC board in the MVR electronics rack. System was allowed to stabilize. Critical metrology and handling tests performed and updates made as needed. Checked hotspot and E/O on both developer tracks-OK. System is up for frontside align only. Backside align is not qualified yet. Will be calibrated next week. SYSTEM IS UP FOR FRONTSIDE ALIGN ONLY!!! From gsosa at stanford.edu Mon Jan 14 15:17:41 2013 From: gsosa at stanford.edu (gsosa at stanford.edu) Date: Mon, 14 Jan 2013 15:17:41 -0800 (PST) Subject: [asml-pcs] Problem asml SNF 2013-01-11 16:59:28: Frontside align only 1/11/13 Message-ID: <32356550.26.1358205461776.JavaMail.coral@snc-coraldb.stanford.edu> 3D align calibrated by ASML. System OK to use for front and back side alignment. From gsosa at stanford.edu Mon Jan 14 15:18:08 2013 From: gsosa at stanford.edu (gsosa at stanford.edu) Date: Mon, 14 Jan 2013 15:18:08 -0800 (PST) Subject: [asml-pcs] Comment asml SNF 2013-01-14 15:18:07: 3D Align Up 1/14/13 Message-ID: <24391795.27.1358205488841.JavaMail.coral@snc-coraldb.stanford.edu> 3D align calibrated by ASML. System OK to use for front and back side alignment. From mzi9890 at yahoo.com Mon Jan 14 22:52:43 2013 From: mzi9890 at yahoo.com (mzi9890 at yahoo.com) Date: Mon, 14 Jan 2013 22:52:43 -0800 (PST) Subject: [asml-pcs] Problem asml SNF 2013-01-14 22:52:43: Wafers Stuck in the tool Message-ID: <31622664.40.1358232763862.JavaMail.coral@snc-coraldb.stanford.edu> 3 wafers in machine, error while exposing zero layer. These are new quartz wafers. From vilanova at stanford.edu Tue Jan 15 09:41:38 2013 From: vilanova at stanford.edu (vilanova at stanford.edu) Date: Tue, 15 Jan 2013 09:41:38 -0800 (PST) Subject: [asml-pcs] Problem asml SNF 2013-01-14 22:52:43: Wafers Stuck in the tool Message-ID: <16880245.8.1358271698932.JavaMail.coral@snc-coraldb.stanford.edu> Removed Wafers From System , Cleaned E chuck and ran test All Operations are ok, Good to use. From mnakamura at snf.stanford.edu Tue Jan 15 12:36:22 2013 From: mnakamura at snf.stanford.edu (mnakamura at snf.stanford.edu) Date: Tue, 15 Jan 2013 12:36:22 -0800 (PST) Subject: [asml-pcs] Comment asml SNF 2013-01-15 12:36:22: Released ASML from 15:30 to 17:00 today Message-ID: <14272801.11.1358282182683.JavaMail.coral@snc-coraldb.stanford.edu> Released ASML from 15:30 to 17:00 today From mnakamura at snf.stanford.edu Wed Jan 16 14:12:41 2013 From: mnakamura at snf.stanford.edu (mnakamura at snf.stanford.edu) Date: Wed, 16 Jan 2013 14:12:41 -0800 (PST) Subject: [asml-pcs] Comment asml SNF 2013-01-16 14:12:40: Released ASML from 14:30 to 16:30 today Message-ID: <14524264.31.1358374361622.JavaMail.coral@snc-coraldb.stanford.edu> Released ASML from 14:30 to 16:30 today From gsosa at stanford.edu Wed Jan 16 15:06:55 2013 From: gsosa at stanford.edu (gsosa at stanford.edu) Date: Wed, 16 Jan 2013 15:06:55 -0800 (PST) Subject: [asml-pcs] Problem asml SNF 2013-01-16 15:06:55: No transparent wafers Message-ID: <6996495.35.1358377615131.JavaMail.coral@snc-coraldb.stanford.edu> Until further notice, do not process any quartz or glass wafers in the stepper. There are potential problems with the pre-alignmnet system unable to properly center the wafer. ASML will erify the P/A setup on Friday(1/18) and make needed adjustments From gsosa at stanford.edu Fri Jan 18 15:46:59 2013 From: gsosa at stanford.edu (gsosa at stanford.edu) Date: Fri, 18 Jan 2013 15:46:59 -0800 (PST) Subject: [asml-pcs] Problem asml SNF 2013-01-16 15:06:55: No transparent wafers Message-ID: <26337422.26.1358552819181.JavaMail.coral@snc-coraldb.stanford.edu> ASML field service checked and calibrated the edge sensor gain and tested many times with quartz and glass. System ok to process transparent wafers. From gsosa at stanford.edu Fri Jan 18 15:47:26 2013 From: gsosa at stanford.edu (gsosa at stanford.edu) Date: Fri, 18 Jan 2013 15:47:26 -0800 (PST) Subject: [asml-pcs] Comment asml SNF 2013-01-18 15:47:25: Update 1/18 Message-ID: <2998209.27.1358552846246.JavaMail.coral@snc-coraldb.stanford.edu> ASML field service checked and calibrated the edge sensor gain and tested many times with quartz and glass. System ok to process transparent wafers. From mahnaz at stanford.edu Tue Jan 22 13:35:07 2013 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Tue, 22 Jan 2013 13:35:07 -0800 Subject: [asml-pcs] particle on the chuck Message-ID: <50FF060B.60207@stanford.edu> Hello all, We found an good size particle on the top right of the wafer with flat toward you. Unfortunately Gary and Mario are both out today. Asml Fse is not avaliable either. If you are running sensitive work, I like to suggest to delay it till tomorrow morning. mahnaz From mnakamura at snf.stanford.edu Tue Jan 22 17:05:31 2013 From: mnakamura at snf.stanford.edu (mnakamura at snf.stanford.edu) Date: Tue, 22 Jan 2013 17:05:31 -0800 (PST) Subject: [asml-pcs] Comment asml SNF 2013-01-22 17:05:31: e-table cleaned Message-ID: <20180711.72.1358903131815.JavaMail.coral@snc-coraldb.stanford.edu> e-table was cleaned, and hotspot check is ok. From mnakamura at snf.stanford.edu Thu Jan 24 13:06:37 2013 From: mnakamura at snf.stanford.edu (mnakamura at snf.stanford.edu) Date: Thu, 24 Jan 2013 13:06:37 -0800 (PST) Subject: [asml-pcs] Comment asml SNF 2013-01-24 13:06:37: Released ASML - 13:00 to 14:30 today Message-ID: <9146717.6.1359061597570.JavaMail.coral@snc-coraldb.stanford.edu> Released ASML - 13:00 to 14:30 today (01-24-2013) From mahnaz at stanford.edu Tue Jan 29 08:35:17 2013 From: mahnaz at stanford.edu (mahnaz at stanford.edu) Date: Tue, 29 Jan 2013 08:35:17 -0800 (PST) Subject: [asml-pcs] Comment asml SNF 2013-01-15 12:36:22: Released ASML from 15:30 to 17:00 today Message-ID: <10861697.48.1359477317234.JavaMail.coral@snc-coraldb.stanford.edu> From mahnaz at stanford.edu Tue Jan 29 08:35:57 2013 From: mahnaz at stanford.edu (mahnaz at stanford.edu) Date: Tue, 29 Jan 2013 08:35:57 -0800 (PST) Subject: [asml-pcs] Comment asml SNF 2013-01-16 14:12:40: Released ASML from 14:30 to 16:30 today Message-ID: <25759288.49.1359477357324.JavaMail.coral@snc-coraldb.stanford.edu>