[asml-pcs] Shutdown asml SNF 2013-01-07 08:11:02: Startup Failure

gsosa at stanford.edu gsosa at stanford.edu
Fri Jan 11 16:58:25 PST 2013

FSE's troubleshot and replaced remote reset PC board in the MVR electronics rack. System was allowed to stabilize. Critical metrology and handling tests performed and updates made as needed. Checked hotspot and E/O on both developer tracks-OK. System is up for frontside align only. Backside align is not qualified yet. Will be calibrated next week. 

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