[asml-pcs] Comment asml SNF 2013-01-08 07:22:32: Update 1/8

gsosa at stanford.edu gsosa at stanford.edu
Fri Jan 11 16:58:31 PST 2013


FSE's troubleshot and replaced remote reset PC board in the MVR electronics rack. System was allowed to stabilize. Critical metrology and handling tests performed and updates made as needed. Checked hotspot and E/O on both developer tracks-OK. System is up for frontside align only. Backside align is not qualified yet. Will be calibrated next week. 


More information about the asml-pcs mailing list