[asml-pcs] Problem asml SNF 2013-01-11 16:59:28: Frontside align only 1/11/13

gsosa at stanford.edu gsosa at stanford.edu
Mon Jan 14 15:17:41 PST 2013

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3D align calibrated by ASML. System OK to use for front and back side alignment.

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Next message: [asml-pcs] Comment asml SNF 2013-01-14 15:18:07: 3D Align Up 1/14/13
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