[asml-pcs] Problem asml SNF 2013-01-16 15:06:55: No transparent wafers

gsosa at stanford.edu gsosa at stanford.edu
Wed Jan 16 15:06:55 PST 2013


Until further notice, do not process any quartz or glass wafers in the stepper. There are potential problems with the pre-alignmnet system unable to properly center the wafer. ASML will erify the P/A setup on Friday(1/18) and make needed adjustments


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