[asml-pcs] particle on the chuck

Mahnaz Mansourpour mahnaz at stanford.edu
Tue Jan 22 13:35:07 PST 2013


Hello all,

We found an good size particle on the top right of the wafer with flat 
toward you.
Unfortunately Gary and Mario are both out today. Asml Fse is not 
avaliable either.
If you are running sensitive work,  I like to suggest to delay it till 
tomorrow morning.

mahnaz


More information about the asml-pcs mailing list