From jaehlee at stanford.edu  Mon Mar  4 00:10:13 2013
From: jaehlee at stanford.edu (jaehlee at stanford.edu)
Date: Mon, 4 Mar 2013 00:10:13 -0800 (PST)
Subject: [asml-pcs] Problem asml SNF 2013-03-04 00:10:13: Couple of issues
Message-ID: <7021349.19.1362384613707.JavaMail.coral@snc-coraldb.stanford.edu>

While using the asml, there were couple of problems.
1. The process stop in the middle of the expousure. after halting for about 30sec, it displays a system error and asks to clear the stepper. I was able to recover the wafer at least.
2. The system was not able to detect the input/output carrier.
Due to this problem, I was not able to proceed further. As a note, I did the standard 3612 1um PR spinning with SRD before going into the asml.
Best,
Jae

From gsosa at stanford.edu  Mon Mar  4 11:10:04 2013
From: gsosa at stanford.edu (gsosa at stanford.edu)
Date: Mon, 4 Mar 2013 11:10:04 -0800 (PST)
Subject: [asml-pcs] Problem asml SNF 2013-03-04 00:10:13: Couple of
	issues
Message-ID: <17951667.31.1362424204661.JavaMail.coral@snc-coraldb.stanford.edu>

System had a leveling issue, possibly related to wafers. Tested system out during daily qual. System OK. Wafer handling OK.

From kathryn.todd at sri.com  Mon Mar 11 17:28:15 2013
From: kathryn.todd at sri.com (kathryn.todd at sri.com)
Date: Mon, 11 Mar 2013 17:28:15 -0700 (PDT)
Subject: [asml-pcs] Problem asml SNF 2013-03-11 17:28:15: wafer handling not
 working well
Message-ID: <31037179.52.1363048095791.JavaMail.coral@snc-coraldb.stanford.edu>

I kept having problems getting the cassettes to go down. Sometimes it doesn't work once, but this time it didn't work many times in a row. Finally I got the system to accept the cassettes, but it rejected the wafers. I don't know if this is user error or a problem with the tool, so I'm not red-lighting.

From luckys at stanford.edu  Tue Mar 12 01:59:20 2013
From: luckys at stanford.edu (luckys at stanford.edu)
Date: Tue, 12 Mar 2013 01:59:20 -0700 (PDT)
Subject: [asml-pcs] Problem asml SNF 2013-03-12 01:59:19: Cassettes do not
	go down!
Message-ID: <28851362.55.1363078760154.JavaMail.coral@snc-coraldb.stanford.edu>

I also tried many times and I kept having the same problem previous user had. It is something to do with the tool. 
I could not process my wafers...

From luckys at stanford.edu  Tue Mar 12 02:00:50 2013
From: luckys at stanford.edu (luckys at stanford.edu)
Date: Tue, 12 Mar 2013 02:00:50 -0700 (PDT)
Subject: [asml-pcs] Problem asml SNF 2013-03-12 02:00:50: Wafer cassetes do
 NOT go down!
Message-ID: <32031297.56.1363078850342.JavaMail.coral@snc-coraldb.stanford.edu>

I also tried many times and the cassettes do not go down for processing. It is the same problem previous user was having I guess...
Did not process my wafers :(

From gsosa at stanford.edu  Tue Mar 12 09:00:58 2013
From: gsosa at stanford.edu (gsosa at stanford.edu)
Date: Tue, 12 Mar 2013 09:00:58 -0700 (PDT)
Subject: [asml-pcs] Problem asml SNF 2013-03-11 17:28:15: wafer handling
 not working well
Message-ID: <16390957.17.1363104058333.JavaMail.coral@snc-coraldb.stanford.edu>

The output port cover sensor was not working correctly. It was not sensing when the port cover was closed. Adjusted the output port cover. Tested system operation. All OK.

From gsosa at stanford.edu  Tue Mar 12 09:01:03 2013
From: gsosa at stanford.edu (gsosa at stanford.edu)
Date: Tue, 12 Mar 2013 09:01:03 -0700 (PDT)
Subject: [asml-pcs] Problem asml SNF 2013-03-12 01:59:19: Cassettes do
	not go down!
Message-ID: <21620273.18.1363104063356.JavaMail.coral@snc-coraldb.stanford.edu>

The output port cover sensor was not working correctly. It was not sensing when the port cover was closed. Adjusted the output port cover. Tested system operation. All OK.

From gsosa at stanford.edu  Tue Mar 12 09:01:10 2013
From: gsosa at stanford.edu (gsosa at stanford.edu)
Date: Tue, 12 Mar 2013 09:01:10 -0700 (PDT)
Subject: [asml-pcs] Problem asml SNF 2013-03-12 02:00:50: Wafer cassetes
 do NOT go down!
Message-ID: <7525272.19.1363104070382.JavaMail.coral@snc-coraldb.stanford.edu>

The output port cover sensor was not working correctly. It was not sensing when the port cover was closed. Adjusted the output port cover. Tested system operation. All OK.

From mnakamura at snf.stanford.edu  Thu Mar 14 10:46:08 2013
From: mnakamura at snf.stanford.edu (mnakamura at snf.stanford.edu)
Date: Thu, 14 Mar 2013 10:46:08 -0700 (PDT)
Subject: [asml-pcs] Comment asml SNF 2013-03-14 10:46:07: Released ASML
 Reservation 11:00 ~ 14:00 Today (03/14/13)
Message-ID: <20697555.35.1363283168046.JavaMail.coral@snc-coraldb.stanford.edu>

Released ASML Reservation 11:00 ~ 14:00 Today (03/14/13)

From mnakamura at snf.stanford.edu  Tue Mar 19 07:54:12 2013
From: mnakamura at snf.stanford.edu (mnakamura at snf.stanford.edu)
Date: Tue, 19 Mar 2013 07:54:12 -0700 (PDT)
Subject: [asml-pcs] Comment asml SNF 2013-03-19 07:54:11: Removed ASML
 reservation from 2 pm to 4 pm today (03/19/13)
Message-ID: <20307314.10.1363704852341.JavaMail.coral@snc-coraldb.stanford.edu>

Removed ASML reservation from 2 pm to 4 pm today (03/19/13)

From vilanova at stanford.edu  Tue Mar 19 09:35:13 2013
From: vilanova at stanford.edu (vilanova at stanford.edu)
Date: Tue, 19 Mar 2013 09:35:13 -0700 (PDT)
Subject: [asml-pcs] Comment asml SNF 2013-03-19 09:35:13: Found a Couple of
 Hotspots ..!
Message-ID: <27472100.11.1363710913239.JavaMail.coral@snc-coraldb.stanford.edu>

Found  A Couple Of Hotspots During The quals, Cleaned E chuck 
With Tooling , tested, All Ok now, Ready  to use

From leixin at stanford.edu  Tue Mar 19 21:56:17 2013
From: leixin at stanford.edu (leixin at stanford.edu)
Date: Tue, 19 Mar 2013 21:56:17 -0700 (PDT)
Subject: [asml-pcs] Shutdown asml SNF 2013-03-19 21:56:17: wafer stuck in
	the machine
Message-ID: <25580287.29.1363755377856.JavaMail.coral@snc-coraldb.stanford.edu>


From mnakamura at snf.stanford.edu  Wed Mar 20 08:07:17 2013
From: mnakamura at snf.stanford.edu (mnakamura at snf.stanford.edu)
Date: Wed, 20 Mar 2013 08:07:17 -0700 (PDT)
Subject: [asml-pcs] Comment asml SNF 2013-03-20 08:07:16: Released ASML
 Reservation - 2 pm ~ 4 pm today (03/20/13)
Message-ID: <33010767.32.1363792037146.JavaMail.coral@snc-coraldb.stanford.edu>

Released ASML Reservation - 2 pm ~ 4 pm today (03/20/13)

From gsosa at stanford.edu  Wed Mar 20 09:16:07 2013
From: gsosa at stanford.edu (gsosa at stanford.edu)
Date: Wed, 20 Mar 2013 09:16:07 -0700 (PDT)
Subject: [asml-pcs] Shutdown asml SNF 2013-03-19 21:56:17: wafer stuck
 in the machine
Message-ID: <13742009.35.1363796167294.JavaMail.coral@snc-coraldb.stanford.edu>

Wafer failed for vacuum, loading to the E-chuck. Retrieved the stranded wafer and cleaned the E-chuck. Tested system during daily qual. All OK. Stranded wafer had many scratches and defects on the back of the wafer and it did not float very well on granite table.

From gpitner at stanford.edu  Wed Mar 20 23:30:15 2013
From: gpitner at stanford.edu (gpitner at stanford.edu)
Date: Wed, 20 Mar 2013 23:30:15 -0700 (PDT)
Subject: [asml-pcs] Shutdown asml SNF 2013-03-20 23:30:15: Wafers Stuck -
 Stage e-chuck didn't initialize
Message-ID: <5135121.76.1363847415584.JavaMail.coral@snc-coraldb.stanford.edu>

Wafer stuck  between P-chuck and E-chuck, with a second wafer on PChuck. Wafer was SRDed and has clean backside. First error seen was "Take Wafer Retry on Position Center --> Preal." Followed by "Failed Take wafer retry on position Center --> preal." and a firmware error. Aborting the batch failed to clear the wafer. I can be reached at 845-705-7555.

From gsosa at stanford.edu  Thu Mar 21 12:06:01 2013
From: gsosa at stanford.edu (gsosa at stanford.edu)
Date: Thu, 21 Mar 2013 12:06:01 -0700 (PDT)
Subject: [asml-pcs] Shutdown asml SNF 2013-03-20 23:30:15: Wafers Stuck
 - Stage e-chuck didn't initialize
Message-ID: <15097373.83.1363892761114.JavaMail.coral@snc-coraldb.stanford.edu>

Removed stranded wafers from system. Wafer failed for transport between centering device and pre-align chuck. Wafer actually fell off of the p-unit and onto the stage. Performed system recovery and full startup. System tested OK.

From mnakamura at snf.stanford.edu  Sun Mar 31 19:41:19 2013
From: mnakamura at snf.stanford.edu (mnakamura at snf.stanford.edu)
Date: Sun, 31 Mar 2013 19:41:19 -0700 (PDT)
Subject: [asml-pcs] Comment asml SNF 2013-03-31 19:41:19: Released ASML
 reservations from 14:00 to 16:00 on 04/04 (THU) and 04/05 (FRI)
Message-ID: <32131769.55.1364784079599.JavaMail.coral@snc-coraldb.stanford.edu>

Released ASML reservations from 14:00 to 16:00 on 04/04 (THU) and 04/05 (FRI)