[asml-pcs] Problem asml SNF 2013-03-11 17:28:15: wafer handling not working well

kathryn.todd at sri.com kathryn.todd at sri.com
Mon Mar 11 17:28:15 PDT 2013


I kept having problems getting the cassettes to go down. Sometimes it doesn't work once, but this time it didn't work many times in a row. Finally I got the system to accept the cassettes, but it rejected the wafers. I don't know if this is user error or a problem with the tool, so I'm not red-lighting.


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