[asml-pcs] Problem asml SNF 2013-03-12 01:59:19: Cassettes do not go down!

luckys at stanford.edu luckys at stanford.edu
Tue Mar 12 01:59:20 PDT 2013


I also tried many times and I kept having the same problem previous user had. It is something to do with the tool. 
I could not process my wafers...


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