[asml-pcs] Problem asml SNF 2013-03-12 02:00:50: Wafer cassetes do NOT go down!

luckys at stanford.edu luckys at stanford.edu
Tue Mar 12 02:00:50 PDT 2013


I also tried many times and the cassettes do not go down for processing. It is the same problem previous user was having I guess...
Did not process my wafers :(


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