[asml-pcs] Problem asml SNF 2013-03-12 02:00:50: Wafer cassetes do NOT go down!

gsosa at stanford.edu gsosa at stanford.edu
Tue Mar 12 09:01:10 PDT 2013


The output port cover sensor was not working correctly. It was not sensing when the port cover was closed. Adjusted the output port cover. Tested system operation. All OK.


More information about the asml-pcs mailing list