[asml-pcs] Comment asml SNF 2013-03-19 09:35:13: Found a Couple of Hotspots ..!

vilanova at stanford.edu vilanova at stanford.edu
Tue Mar 19 09:35:13 PDT 2013


Found  A Couple Of Hotspots During The quals, Cleaned E chuck 
With Tooling , tested, All Ok now, Ready  to use


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