[asml-pcs] Shutdown asml SNF 2013-03-19 21:56:17: wafer stuck in the machine

gsosa at stanford.edu gsosa at stanford.edu
Wed Mar 20 09:16:07 PDT 2013


Wafer failed for vacuum, loading to the E-chuck. Retrieved the stranded wafer and cleaned the E-chuck. Tested system during daily qual. All OK. Stranded wafer had many scratches and defects on the back of the wafer and it did not float very well on granite table.


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