[asml-pcs] Shutdown asml SNF 2013-03-20 23:30:15: Wafers Stuck - Stage e-chuck didn't initialize

gpitner at stanford.edu gpitner at stanford.edu
Wed Mar 20 23:30:15 PDT 2013


Wafer stuck  between P-chuck and E-chuck, with a second wafer on PChuck. Wafer was SRDed and has clean backside. First error seen was "Take Wafer Retry on Position Center --> Preal." Followed by "Failed Take wafer retry on position Center --> preal." and a firmware error. Aborting the batch failed to clear the wafer. I can be reached at 845-705-7555.


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