[asml-pcs] Shutdown asml SNF 2013-03-20 23:30:15: Wafers Stuck - Stage e-chuck didn't initialize

gsosa at stanford.edu gsosa at stanford.edu
Thu Mar 21 12:06:01 PDT 2013


Removed stranded wafers from system. Wafer failed for transport between centering device and pre-align chuck. Wafer actually fell off of the p-unit and onto the stage. Performed system recovery and full startup. System tested OK.


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