[asml-pcs] Comment asml SNF 2013-05-24 14:54:50: Update 5/24

gsosa at stanford.edu gsosa at stanford.edu
Fri May 24 14:54:51 PDT 2013


The system was repaired by ASML field service but will not be ready for use late tomorrow morning. Due to the nature of the problem, the environmental controls were not functioning and stepper focus drifted. The system will stabilize until tomorrow morning. At that time we will verify the stepper condition by performing the daily quals and then release the system for use.


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