[asml-pcs] Shutdown asml SNF 2013-05-22 18:29:40: CT failed

gsosa at stanford.edu gsosa at stanford.edu
Sat May 25 11:45:04 PDT 2013


The system was repaired by ASML field service. Tool is now stable. Daily qual completed and passed. Cycled wafes through system-OK. System ready for use.


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