[asml-pcs] Problem asml SNF 2013-05-29 22:08:14: Occur "system error"

yjhuo at stanford.edu yjhuo at stanford.edu
Wed May 29 22:08:14 PDT 2013


Failed to use it. Experience the same problem with the previous user. A "system error" occurred when the wafer is loaded into the E-Chunk.


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