[asml-pcs] Shutdown asml SNF 2013-05-30 02:20:20: System error - unrecoverable.

gpitner at stanford.edu gpitner at stanford.edu
Thu May 30 02:20:21 PDT 2013


I receive a system error after the wafer moves onto the e-chuck, which apparently was seen by previous users. It appears that the subsystems never initialize, and the prealignment never happens on the p-chuck. When it moves to the e-chuck a system error eventually asks to abort batch. Wafer appeared to be stuck on e-chuck for several minutes, but after a while it moved along. Wafer recovered.


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