[asml-pcs] Problem asml SNF 2013-05-30 20:38:43: system error

kokab at stanford.edu kokab at stanford.edu
Thu May 30 20:38:43 PDT 2013


I receive a system error after the 4th quartz wafer moved onto the e-chuck. When it moves to the e-chuck a system error eventually asks to abort batch. Wafer appeared to be stuck on e-chuck for several minutes, but after a while it moved along. Wafer recovered. the image was XPA alignment mark.


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