[asml-pcs] Shutdown asml SNF 2013-05-31 01:36:08: error

maxms at stanford.edu maxms at stanford.edu
Fri May 31 01:36:09 PDT 2013


will not run any wafers, always gets stuck on P-chuck.  
if you ran wafers the day before and it did not go through, PLEASE run them again during the following day while staff is still around, so the system isn't down overnight!


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