[asml-pcs] Shutdown asml SNF 2013-05-31 01:36:08: error

mnakamura at snf.stanford.edu mnakamura at snf.stanford.edu
Fri May 31 10:51:50 PDT 2013


The system had the same error as 05/29. PAS application restarted, and daily qual completed.
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05/30/2013  18:24:27.  Machine:3628  (Rel:8.9.0.c, LSMA [mi], LSPR_ST_primitives.c, , 1176)
 ERROR:: LS-027d
Timeout on wait for interrupt.
05/30/2013  18:24:28.  Machine:3628  (Rel:8.9.0.c, LSMA [mi], LSDI_ST_diagnostic.c, , 1221)
 : OK
DIAGNOSTICS INFORMATION Level Sensor Driver status :
Height not OK. Window coarse = 99.6094 [nm].
Window fine = 99.6094 [nm].
05/30/2013  18:24:28.  Machine:3628  (Rel:8.9.0.c, LSMA [mi], LSAA_ST_actions.c, , 992)
 ERROR:: LS-0281 (linked to LS-027d)
Timeout occurred in wait keep.
Focussing error while waiting for white ready.


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