From mahnaz at stanford.edu  Thu Aug  9 17:03:52 2007
From: mahnaz at stanford.edu (Mahnaz Mansourpour)
Date: Thu, 09 Aug 2007 17:03:52 -0700
Subject: [Fwd: I line resist/ASML]
Message-ID: <46BBAB68.8010509@stanford.edu>

  By the way, so far  the exposure is about 120 to 130 mj on the asml 
for,.  I will post the pictures on my office door for now as I  did not 
get a chance to go through them and organize them.

mahnaz

-------- Original Message --------
Subject: I line resist/ASML
Date: Thu, 09 Aug 2007 15:23:00 -0700
From: Mahnaz Mansourpour <mahnaz at stanford.edu>
To: Mahnaz Mansourpour <mahnaz at stanford.edu>




Hello all,

Here some preliminary result of the new I line resist for ASML stepper
The resist is shipley SPR955cm-.7.
I am attaching a spin speed curve  and another chart with more details 
 measurement  ( 5 points).
The soft bake temp. for all of these tests are done   120 second at 90C 
on the SVGcoat.
I have done E0 test on the asml and I see the best thickness for the 955 
resist at .9 to 1 um.
All these  tests need to be repeated  at least one more time but for now 
should do for some  of you whom wants to get in there and run the system.

I have updated the sheets next to the svg coat  and SVG developer  with 
the correct recipes:
Recipe #5 for the svgcoat  ( front track only)
Recipe  #2 for the SVGdev and   SVGdev2
Please note that the new developer  has surfactant and is called Shipley 
MF26A.
Thank Uli for helping with upgrading the paper work.
I will put a copy of the spin speed curve in the RED LItho Binder.

Please note that shipley 3612 still can be used but we will not be able 
to push the resolution behind .6 um. To my surprise the exposure is very 
fast,  minimum exposure on the ASML is 40mj and we have been exposing it 
at 45mj.
mahnaz
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From mahnaz at stanford.edu  Thu Aug 23 09:07:35 2007
From: mahnaz at stanford.edu (Mahnaz Mansourpour)
Date: Thu, 23 Aug 2007 09:07:35 -0700
Subject: 6" switch
Message-ID: <46CDB0C7.70301@stanford.edu>


Hello all,

I have been told that the system will be switched to 6" next Wednesday 
8/29  for testing the edge sensor and some other work.  Asml will remain 
in 6" mode till Friday 8/31  around 2 in the afternoon.
I will be on vacation from Wednesday 29th till september 5th,  any 
issues or concerns see Gary Sosa
gsosa at stanford.edu , Gary's phone#  5-1685     or Mary.

This is a  good opportunity for any one who wants to try 6" capability, 
you can use headway or Laurell to spin up the wafers. I will be more 
than happy to give you the process flow.

mahnaz



From binder.mann at asml.com  Thu Aug 23 09:11:16 2007
From: binder.mann at asml.com (Binder Mann)
Date: Thu, 23 Aug 2007 12:11:16 -0400
Subject: 6" switch
In-Reply-To: <46CDB0C7.70301@stanford.edu>
Message-ID: <0788D5A046D0134DB5F0CEF36E4EBF6133CC4A@USWILX84.sn-us.asml.com>

Mahnaz,
Thank you,
Regards, Binder 

-----Original Message-----
From: Mahnaz Mansourpour [mailto:mahnaz at stanford.edu] 
Sent: Thursday, August 23, 2007 09:08
To: asml at snf.stanford.edu; Vilanova; Gary J Sosa; Mary Tang; Paul
Rissman; Colby Bellew; Mahnaz Mansourpour
Subject: 6" switch


Hello all,

I have been told that the system will be switched to 6" next Wednesday
8/29  for testing the edge sensor and some other work.  Asml will remain
in 6" mode till Friday 8/31  around 2 in the afternoon.
I will be on vacation from Wednesday 29th till september 5th,  any
issues or concerns see Gary Sosa
gsosa at stanford.edu , Gary's phone#  5-1685     or Mary.

This is a  good opportunity for any one who wants to try 6" capability,
you can use headway or Laurell to spin up the wafers. I will be more
than happy to give you the process flow.

mahnaz



-- 
The information contained in this communication and any attachments is confidential and may be privileged, and is for the sole use of the intended recipient(s). Any unauthorized review, use, disclosure or distribution is prohibited.  Unless explicitly stated otherwise in the body of this communication or the attachment thereto (if any), the information is provided on an AS-IS basis without any express or implied warranties or liabilities.  To the extent you are relying on this information, you are doing so at your own risk.   If you are not the intended recipient, please notify the sender immediately by replying to this message and destroy all copies of this message and any attachments. ASML is neither liable for the proper and complete transmission of the information contained in this communication, nor for any delay in its receipt. 



From mahnaz at stanford.edu  Fri Aug 24 15:37:49 2007
From: mahnaz at stanford.edu (Mahnaz Mansourpour)
Date: Fri, 24 Aug 2007 15:37:49 -0700
Subject: ASML Reservation policy
Message-ID: <46CF5DBD.4070501@stanford.edu>


Hello all,

The reservation on the system during prime time ( 7 am to 7 pm) is two 
hours. The grace period is 15 minutes for being late for reservation and 
please do make sure that you cancel your reservation in timely fashion.
If you need to do extensive file writing,  then it should be done on 
emulator.
One person at the time on the system please do not interrupt some one 
whom is enabled on the system for coping and changing your file or etc.. 
 I have already received few complains.

Asml crew and I make every effort to reserve the system for training and 
pm work in timely fashion but  a lot of times is out of our control. I 
am sure we will get better as we scroll along the way.

Mahnaz


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From jrjain at stanford.edu  Mon Aug 27 12:35:47 2007
From: jrjain at stanford.edu (Jinendra Raja Jain)
Date: Mon, 27 Aug 2007 12:35:47 -0700
Subject: asml free at 2pm
Message-ID: <20070827123547.kwm3aqnpryg48ck8@webmail.stanford.edu>

Wafers won't be ready.  Sorry for late notice.



From jrjain at stanford.edu  Mon Aug 27 16:23:00 2007
From: jrjain at stanford.edu (Jinendra Raja Jain)
Date: Mon, 27 Aug 2007 16:23:00 -0700
Subject: asml free 8-10pm
Message-ID: <20070827162300.n96igotpcf4g88s4@webmail.stanford.edu>

Previous exposure looked ok, so don't need to use tonight.


From rmelamud at stanford.edu  Tue Aug 28 15:25:00 2007
From: rmelamud at stanford.edu (rmelamud at stanford.edu)
Date: Tue, 28 Aug 2007 15:25:00 -0700
Subject: ASML reservation tonight
Message-ID: <20070828152500.iinbk5p8sgwwo80w@webmail.stanford.edu>

Hi ASML users,

I have a long reservation tonight that I do not intend to use all of.
I'm still waiting for my mask to arrive and will know around 7pm  
tonight if I'll get it in time.  But wanted to give you a head's up.  
I'll send out another email as soon as I know if I'll be using  
reservation.

Renata


From rmelamud at stanford.edu  Tue Aug 28 18:40:28 2007
From: rmelamud at stanford.edu (rmelamud at stanford.edu)
Date: Tue, 28 Aug 2007 18:40:28 -0700
Subject: ASML reservation tonight
In-Reply-To: <20070828152500.iinbk5p8sgwwo80w@webmail.stanford.edu>
References: <20070828152500.iinbk5p8sgwwo80w@webmail.stanford.edu>
Message-ID: <20070828184028.xtnmqda6occwww8g@webmail.stanford.edu>

Looks like I'll get my mask late tonight.
I released the 8pm-10pm slot.

Renata

Quoting rmelamud at stanford.edu:

> Hi ASML users,
>
> I have a long reservation tonight that I do not intend to use all of.
> I'm still waiting for my mask to arrive and will know around 7pm
> tonight if I'll get it in time.  But wanted to give you a head's up.
> I'll send out another email as soon as I know if I'll be using
> reservation.
>
> Renata