6" switch

Mahnaz Mansourpour mahnaz at stanford.edu
Thu Aug 23 09:07:35 PDT 2007

Hello all,

I have been told that the system will be switched to 6" next Wednesday 
8/29  for testing the edge sensor and some other work.  Asml will remain 
in 6" mode till Friday 8/31  around 2 in the afternoon.
I will be on vacation from Wednesday 29th till september 5th,  any 
issues or concerns see Gary Sosa
gsosa at stanford.edu , Gary's phone#  5-1685     or Mary.

This is a  good opportunity for any one who wants to try 6" capability, 
you can use headway or Laurell to spin up the wafers. I will be more 
than happy to give you the process flow.


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