mahnaz at stanford.edu
Thu Aug 23 09:07:35 PDT 2007
I have been told that the system will be switched to 6" next Wednesday
8/29 for testing the edge sensor and some other work. Asml will remain
in 6" mode till Friday 8/31 around 2 in the afternoon.
I will be on vacation from Wednesday 29th till september 5th, any
issues or concerns see Gary Sosa
gsosa at stanford.edu , Gary's phone# 5-1685 or Mary.
This is a good opportunity for any one who wants to try 6" capability,
you can use headway or Laurell to spin up the wafers. I will be more
than happy to give you the process flow.
More information about the asml