6" switch

Binder Mann binder.mann at asml.com
Thu Aug 23 09:11:16 PDT 2007

Thank you,
Regards, Binder 

-----Original Message-----
From: Mahnaz Mansourpour [mailto:mahnaz at stanford.edu] 
Sent: Thursday, August 23, 2007 09:08
To: asml at snf.stanford.edu; Vilanova; Gary J Sosa; Mary Tang; Paul
Rissman; Colby Bellew; Mahnaz Mansourpour
Subject: 6" switch

Hello all,

I have been told that the system will be switched to 6" next Wednesday
8/29  for testing the edge sensor and some other work.  Asml will remain
in 6" mode till Friday 8/31  around 2 in the afternoon.
I will be on vacation from Wednesday 29th till september 5th,  any
issues or concerns see Gary Sosa
gsosa at stanford.edu , Gary's phone#  5-1685     or Mary.

This is a  good opportunity for any one who wants to try 6" capability,
you can use headway or Laurell to spin up the wafers. I will be more
than happy to give you the process flow.


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