the alignment mark etching on Pyrex glass wafer
chen0622 at yahoo.com
Tue Dec 4 20:47:04 PST 2007
I need to etch the ASML alignment marks on the Pyrex glass wafer. Since the Pyrex glass wafer is considered as gold contaminated, therefore I only have the options on either drytek1 or drytek4. The alignment mark needs about 2300 A deep. If you could share your experience or ideas about the recipe and etch rate to me, that would be a big help for me.
Thanks in advance and have a nice evening!
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