the alignment mark etching on Pyrex glass wafer

c.c. chen0622 at
Tue Dec 4 20:47:04 PST 2007

Hi guys,

   I need to etch the ASML alignment marks on the Pyrex glass wafer.  Since the Pyrex glass wafer is considered as gold contaminated, therefore I only have the options on either drytek1 or drytek4.  The alignment mark needs about 2300 A deep.   If you could share your experience or ideas about the recipe and etch rate to me, that would be a big help for me.  

Thanks in advance and have a nice evening!

Chih-Chang Chen
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