From mailvv at stanford.edu Thu Nov 1 11:53:25 2007 From: mailvv at stanford.edu (Wei Wang) Date: Thu, 1 Nov 2007 11:53:25 -0700 Subject: asml free 12pm-13pm today Message-ID: <001801c81cb8$7c2467e0$6400a8c0@personalee2984> An HTML attachment was scrubbed... URL: From mahnaz at stanford.edu Wed Nov 7 16:45:30 2007 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Wed, 07 Nov 2007 16:45:30 -0800 Subject: developer update Message-ID: <47325C2A.4000608@stanford.edu> Hello all, I am sending this email out with regards to developing asml wafers with 955-.7 I line resist. If you see the circular ring on your wafers you may choose to develop with program 5 on the SVGdev2 which Is exact copy of program 2 without the rinse. I have ran some wafers and still waiting for SEM result, till I get the result and be able to run more tests might be a while so I thought to share the information with you all. mahnaz From jrjain at stanford.edu Mon Nov 12 21:00:12 2007 From: jrjain at stanford.edu (Jinendra Raja Jain) Date: Mon, 12 Nov 2007 21:00:12 -0800 Subject: asml free at 9pm Message-ID: <20071112210012.4qctbzupwgk084oc@webmail.stanford.edu> From jrjain at stanford.edu Mon Nov 12 21:01:09 2007 From: jrjain at stanford.edu (Jinendra Raja Jain) Date: Mon, 12 Nov 2007 21:01:09 -0800 Subject: Correction: asml free at 11pm In-Reply-To: <20071112210012.4qctbzupwgk084oc@webmail.stanford.edu> References: <20071112210012.4qctbzupwgk084oc@webmail.stanford.edu> Message-ID: <20071112210109.7x7s8rprko40cosc@webmail.stanford.edu> Apologies From rmelamud at stanford.edu Tue Nov 20 16:37:26 2007 From: rmelamud at stanford.edu (Renata Melamud) Date: Tue, 20 Nov 2007 16:37:26 -0800 Subject: ASML res removed Message-ID: <47437DC6.7010406@stanford.edu> wafers not ready... Renata From mahnaz at stanford.edu Mon Nov 26 13:39:50 2007 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Mon, 26 Nov 2007 13:39:50 -0800 Subject: Reticles Message-ID: <474B3D26.9070100@stanford.edu> Hello So this morning I am trying to use the system and the smif box is full. I like to remind everyone that you should not leave your reticles in the box. There are two reticles that we are keeping in there and that should leave us with 4 available slots. I do understand that the table across the asml is too small and we are asking for disaster, I see what I can do during the shut down to create some more table space. Ideas or suggestion are welcome. mahnaz From mahnaz at stanford.edu Tue Nov 27 14:52:53 2007 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Tue, 27 Nov 2007 14:52:53 -0800 Subject: update Message-ID: <474C9FC5.2070900@stanford.edu> Hello all, I like to make this very clear that you are not allowed to run wafers that has scratches, scribe, resist or any kind of scum on the back of wafers through the asml system. I believe that I have been telling everyone during training that you have to check the back of the wafers before exposure on ASML. Even tiny bit of resist or EBR left on the back needs to be cleaned and the wafers need to go through the spin rinse dryer before going to ASML. I have asked the field service to give me the exact location of the arm with respect to flat so I have better understanding of it. The FSE checked the log and we did not get any fluctuation in house or system vacuum, it was caused by the wafers the last two times. Please if not sure show the wafers to me, Gary or the asml fox. We can not have this happen again, does not look good. mahnaz -------------- next part -------------- An HTML attachment was scrubbed... URL: From rmelamud at stanford.edu Wed Nov 28 17:28:01 2007 From: rmelamud at stanford.edu (rmelamud at stanford.edu) Date: Wed, 28 Nov 2007 17:28:01 -0800 Subject: asml res removed @8pm Message-ID: <20071128172801.k2pikl47404gws08@webmail.stanford.edu> From jrjain at stanford.edu Wed Nov 28 18:17:41 2007 From: jrjain at stanford.edu (Jinendra Raja Jain) Date: Wed, 28 Nov 2007 18:17:41 -0800 Subject: asml free at 10pm Message-ID: <000c01c8322e$054bd780$4a3342ab@jrjain> -------------- next part -------------- An HTML attachment was scrubbed... URL: