developer update

Mahnaz Mansourpour mahnaz at stanford.edu
Wed Nov 7 16:45:30 PST 2007



Hello all,

I am  sending this email out with regards to developing asml  wafers 
with 955-.7 I line resist. If you see the circular ring on your wafers 
you may choose to develop with program 5 on the SVGdev2  which Is exact 
copy of program 2 without the rinse.
I have ran some wafers and still waiting for SEM result,  till  I get 
the result and be able to run more tests might be a while so I thought 
to share the information with you all.

mahnaz 




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