mahnaz at stanford.edu
Wed Nov 7 16:45:30 PST 2007
I am sending this email out with regards to developing asml wafers
with 955-.7 I line resist. If you see the circular ring on your wafers
you may choose to develop with program 5 on the SVGdev2 which Is exact
copy of program 2 without the rinse.
I have ran some wafers and still waiting for SEM result, till I get
the result and be able to run more tests might be a while so I thought
to share the information with you all.
More information about the asml