From mailvv at stanford.edu Tue Apr 1 11:50:55 2008 From: mailvv at stanford.edu (Wei Wang) Date: Tue, 01 Apr 2008 11:50:55 -0700 Subject: asml free 2:30pm to 5:30pm today Message-ID: <20080401115055.byw0xnin4g044woo@webmail.stanford.edu> From mtang at stanford.edu Wed Apr 2 22:49:57 2008 From: mtang at stanford.edu (Mary Tang) Date: Wed, 02 Apr 2008 22:49:57 -0700 Subject: Change in ASML Access schedule for April Message-ID: <47F47005.5080103@stanford.edu> Hi all -- The ASML had originally been scheduled for a demo and testing/installation of the 3D align upgrade for Monday, 4/7 through Friday, 4/18 (with the weekend available for labmember use.) Because the 3D align installation expert was called for jury duty, the schedule will be postponed by one week, so the system will be unavailable Monday-Friday from 4/14-4/25 instead (the intervening weekend being made available for labmember use.) Let us know if this schedule change poses undue hardship and we will help coordinate alternative arrangements. Thanks, SNF and ASML staff From mahnaz at stanford.edu Wed Apr 9 14:01:31 2008 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Wed, 09 Apr 2008 14:01:31 -0700 Subject: Clean up Message-ID: <47FD2EAB.6020008@stanford.edu> Hello all, It has been brought up to my attention that Asml users are leaving a big mess on the table across the asml and next to the fusion system. As it is there are not much space so please Remove all your masks from the table Do not leave metal cassettes from SVg there, simply, take it back. Get rid of your wipes and gloves...IT is not Binder/Linda or mario/Gary and I to clean up the table. If not cleaned by Thursday, I will send the items to lost and find. mahnaz From ofidaner at yahoo.com Sat Apr 12 07:58:34 2008 From: ofidaner at yahoo.com (Onur Fidaner) Date: Sat, 12 Apr 2008 07:58:34 -0700 (PDT) Subject: asml wafers stuck -> can anyone help? Message-ID: <93072.30541.qm@web56113.mail.re3.yahoo.com> Dear asml users, Previous user's wafers were stuck in the tool at the most unfortunate time, apparently (Fri evening). I was hoping to finish a process before the extended shutdown starting next Monday. I would be glad if someone who is able to remove those wafers can come here today and take a look. I would also be glad if we can try somewhat risky wafers when Gary is around. Thank you very much, Onur __________________________________________________ Do You Yahoo!? Tired of spam? Yahoo! Mail has the best spam protection around http://mail.yahoo.com From mtang at snf.stanford.edu Wed Apr 16 19:26:21 2008 From: mtang at snf.stanford.edu (Mary Tang) Date: Wed, 16 Apr 2008 19:26:21 -0700 Subject: ASML Availability, off hours Message-ID: <4806B54D.3050109@snf.stanford.edu> Dear ASML Users -- Quite of few of you had expressed frustration about being unable to use the ASML system last weekend, as it went down on a Friday night (4/11) for a stuck wafer. This was especially unfortunate because it occurred just before the scheduled two-week 3-D align upgrade. The system will be available this weekend for general labmember use. In case of an urgent situation, call the SNF off-hours phone at 650-521-7306. The staff member on duty has contact info for ASML engineering support. Understand that staff will not be called in to make a repair at 11 pm (when this stuck wafer was reported), but that a next morning response is more realistic. Please also realize that ASML is under no obligation to offer off-hours or weekend support, and that SNF staff are authorized to support only a limited set of engineering functions. As I understand it, the stuck wafer in Friday night's incident was observed to have residual resist on the backside, thick enough to feel through a gloved finger. Your training should have covered your responsibility to ensure that your wafers are clean on the backside and not warped. Understand that although the ASML is very easy to use, this is a finely tuned machine built using a great deal of sophisticated engineering -- wafer quality which might be well-tolerated in a simpler, most robust tool, could seriously damage the ASML. If your wafer quality is questionable, you are reminded to inform any of the engineers responsible for the ASML in advance so that they can ensure engineering support is on-hand to rescue the system if necessary. In the case of a stuck wafer in which the responsible engineers were not informed, staff and ASML are directed to keep the wafer(s) for inspection. If it is determined that the wafers were properly not inspected before being run on the system, the user will be disqualified from the system. We are fortunate to have this partnership with ASML, which allows us access, not only to this wonderful machine, but also to the excellent ASML engineering staff. For continued access, we must use this system responsibly. Thanks for your attention -- Your SNF Staff -- Mary X. Tang, Ph.D. Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at stanford.edu http://snf.stanford.edu From cmcg at stanford.edu Thu Apr 17 18:03:42 2008 From: cmcg at stanford.edu (Christopher McGuinness) Date: Thu, 17 Apr 2008 18:03:42 -0700 Subject: ASML open Saturday 20:00-21:00 Message-ID: <393d7fe80804171803i41d6c0d8jdbc6d870bf446c35@mail.gmail.com> enjoy -------------- next part -------------- An HTML attachment was scrubbed... URL: From cmcg at stanford.edu Thu Apr 17 18:04:38 2008 From: cmcg at stanford.edu (Christopher McGuinness) Date: Thu, 17 Apr 2008 18:04:38 -0700 Subject: woops, meant Sunday 20:00-21:00 Message-ID: <393d7fe80804171804v2932593fx918849e8fd731afe@mail.gmail.com> -------------- next part -------------- An HTML attachment was scrubbed... URL: From rohits at gmail.com Sat Apr 19 14:52:57 2008 From: rohits at gmail.com (Rohit Shenoy) Date: Sat, 19 Apr 2008 14:52:57 -0700 Subject: released ASML reservations Message-ID: <17615cae0804191452p1b34e4d3s2abab3082d6227d0@mail.gmail.com> We got all our work done early, so the ASML is now available at the following times: Sat Apr 19 21:30-22:00, 23:00 - midnight Sun Apr 20 14:00-14:30 regards, -- Rohit From sanjah at stanford.edu Sat Apr 19 21:06:47 2008 From: sanjah at stanford.edu (Sanja Hadzialic) Date: Sat, 19 Apr 2008 21:06:47 -0700 Subject: released ASML reservations on Sunday In-Reply-To: <17615cae0804191452p1b34e4d3s2abab3082d6227d0@mail.gmail.com> References: <17615cae0804191452p1b34e4d3s2abab3082d6227d0@mail.gmail.com> Message-ID: <20080419210647.jterya8pb4gc4kos@webmail.stanford.edu> 9:00-10:30 & 16:00-18:00 From gsosa at stanford.edu Sat Apr 19 23:46:00 2008 From: gsosa at stanford.edu (Gary J Sosa) Date: Sat, 19 Apr 2008 23:46:00 -0700 Subject: The stepper is back up Message-ID: <20080419234600.s7crq4y1ogkw0w4k@webmail.stanford.edu> Hi ASML Users The ASML stepper is up and ready to use again. Please see coral for details. ...Gary From maryamzm at stanford.edu Sun Apr 20 04:35:41 2008 From: maryamzm at stanford.edu (Maryam Ziaei-Moayyed) Date: Sun, 20 Apr 2008 04:35:41 -0700 Subject: The stepper is back up In-Reply-To: <20080419234600.s7crq4y1ogkw0w4k@webmail.stanford.edu> References: <20080419234600.s7crq4y1ogkw0w4k@webmail.stanford.edu> Message-ID: <20080420043541.3tfcx7lv7ogcog4c@webmail.stanford.edu> Hi Gary, I wanted to really thank you again on behalf of all ASML users for your very quick response tonight, and not only fixing the ASML but also making sure that it ran smoothly. Of course no one expected you to come in at 11pm on a Saturday night, but we are all very appreciative that you did and we got a lot more work done because of it :) -Maryam Quoting Gary J Sosa : > Hi ASML Users > > The ASML stepper is up and ready to use again. Please see coral > for details. > > ...Gary From nishiy at stanford.edu Sun Apr 20 10:58:01 2008 From: nishiy at stanford.edu (Yoshio Nishi) Date: Sun, 20 Apr 2008 10:58:01 -0700 Subject: The stepper is back up In-Reply-To: <20080420043541.3tfcx7lv7ogcog4c@webmail.stanford.edu> Message-ID: <000401c8a310$15315d20$f21042ab@stanford.edu> Gary, Thank you very much for your extra effort and achievement to support SNF users. Yoshio Nishi -----Original Message----- From: Maryam Ziaei-Moayyed [mailto:maryamzm at stanford.edu] Sent: Sunday, April 20, 2008 4:36 AM To: Gary J Sosa Cc: asml at snf.stanford.edu Subject: Re: The stepper is back up Hi Gary, I wanted to really thank you again on behalf of all ASML users for your very quick response tonight, and not only fixing the ASML but also making sure that it ran smoothly. Of course no one expected you to come in at 11pm on a Saturday night, but we are all very appreciative that you did and we got a lot more work done because of it :) -Maryam Quoting Gary J Sosa : > Hi ASML Users > > The ASML stepper is up and ready to use again. Please see coral > for details. > > ...Gary From rhenn at stanford.edu Sun Apr 20 16:40:05 2008 From: rhenn at stanford.edu (Robert Hennessy) Date: Sun, 20 Apr 2008 16:40:05 -0700 Subject: ASML Reservation Released (Sun. 6 pm - 7pm) Message-ID: <20080420164005.mbsoc77w0scwko8k@webmail.stanford.edu> Finished Early. Reservation Sunday 6 pm - 7 pm released. From sbasumal at stanford.edu Mon Apr 21 02:37:13 2008 From: sbasumal at stanford.edu (Shrestha Basu Mallick) Date: Mon, 21 Apr 2008 02:37:13 -0700 Subject: If there is anybody left... Message-ID: <480C6049.8000308@stanford.edu> ...who still needs to use precious ASML weekend time, I have removed my reservation from 5.30 am to 7.00 am -Shrestha From masaharu at stanford.edu Mon Apr 21 03:44:09 2008 From: masaharu at stanford.edu (Masaharu Kobayashi) Date: Mon, 21 Apr 2008 03:44:09 -0700 Subject: If there is anybody left... In-Reply-To: <480C6049.8000308@stanford.edu> References: <480C6049.8000308@stanford.edu> Message-ID: <20080421034409.z8zcs9lqqgckskwk@webmail.stanford.edu> Thank you Shrestha, If my process is in time, I will take it! Masaharu Quoting Shrestha Basu Mallick : > ...who still needs to use precious ASML weekend time, I have removed my > reservation from 5.30 am to 7.00 am > -Shrestha From mahnaz at stanford.edu Fri Apr 25 17:12:28 2008 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Fri, 25 Apr 2008 17:12:28 -0700 Subject: update Message-ID: <4812736C.7010309@stanford.edu> Hello all, Asml crew are hard at work and I have been told that the system will be up around 8ish this evening. Binder said that she has to run the overlay wafer because the chuck has been changed so before they turn the system to us this test has to be done. The 3D upgrade did not go through and we need to schedule that for very near future and most likely we need one week. As soon as all the facts are known we will communicate with you. mahnaz From mahnaz at stanford.edu Fri Apr 25 17:56:58 2008 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Fri, 25 Apr 2008 17:56:58 -0700 Subject: update Message-ID: <48127DDA.8090302@stanford.edu> Hello all, I just find out that due to many changes on the system the metrology test is not performing and the reticle table is not adjusting accordingly. The system will be down through the weekend and most of Monday. Asml needs to get some tooling to take care of few issues on Monday. Asml crew and Gary are still in the lab working hard at it. We apologize for any inconvenient this may cause and I assure that all your spun up wafers will be good till next week. Please take the opportunity and enjoy the beautiful weekend, things like this happens all the time. mahnaz From gsosa at stanford.edu Fri Apr 25 21:25:22 2008 From: gsosa at stanford.edu (Gary J Sosa) Date: Fri, 25 Apr 2008 21:25:22 -0700 Subject: Stepper Status 4/25/08 Message-ID: <20080425212522.qug6xuc3s0g84c0w@webmail.stanford.edu> Hi ASM-L Users.... The stepper is still down despite a valiant effort by the ASM-L crew. Thanks ASM-L for staying late and trying to bring the tool up for the weekend. We will continue working on the tool on Monday and will keep you updated. Here is the coral summary of work done: Tool Status 4/25/2008 The stepper is still down. ASM-L checked and updated red and white light focus and updated tilt maching. Red/blue test (machine matching to itself) is failing and cannot be corrected through software. X / Y translation, rotation and reticle height are out of spec. Metrology setup will continue on Monday morning and may require mechanical setups within the tool to bring the tool back into specification. ... Gary From gsosa at stanford.edu Mon Apr 28 20:10:20 2008 From: gsosa at stanford.edu (Gary J Sosa) Date: Mon, 28 Apr 2008 20:10:20 -0700 Subject: Stepper Status 4/28/2008 Message-ID: <20080428201020.frbz366pk4okgoow@webmail.stanford.edu> Hi ASM-L Users... The stepper is back up for 4 Inch wafer processing. Please shoot a test wafer and verify your process before exposing all your wafers. If you have any problems, report them in Coral. I would again like to thank the ASM-L crew for their efforts, especially Binder, Thanh and Linda for staying late and ensuring that the tool came up for this evening. Many, Many thanks!! Here is the summary of work done as reported in Coral: Stepper Status 4/28/2008 System is back up for 4" wafer processing. ASM-L did the following to bring the tool up: 1) Cleaned the reticle table and reticle. 2) Checked and re-determined Basic Machine Constants and fine tuned wafer shifts. 3) Verified with red-blue tests with software updates- Still out of spec( Reticle table tilt). 4) Mechanically adjusted reticle table tilt with factory tooling and retested with red-blue test- Reticle table tilt now within spec(< 10 microns). All other critical parameters also within spec. 5) Verified white lite focus and redefined the image sensor reference state. 6) Converted the tool back to 4" and did all needed calibrations. System is up and ready for use. Users please shoot a test wafer before exposing all wafers and inspect for alignment. Please report any problems in Coral. ....Gary From mahnaz at stanford.edu Wed Apr 30 10:11:10 2008 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Wed, 30 Apr 2008 10:11:10 -0700 Subject: urgent update Message-ID: <4818A82E.9010902@stanford.edu> Hello all, You need to read this carefully and give us feed back immediately.... Here are some facts: 3D front side went through and passed all the tests. Due to unexpected problems, ASML crew ran out of time to perform 3D align calibrations for back side alignment.. There is a time limit of less than a month for the installation of the back side 3D, other wise both ( top and bottom ) needs to be redo and tested and that would add easily 3-4 days more down time to the system. After the 3D installation completed , overlay tests (6" Wafers) needs to be ran and etched in a different company ( needs to be coordinated and scheduled with outsourcing company). Binder will be incharge with help of ASML crew so coordination is the key. This week May 28th we are already one week in to our less than a month restriction. Suggestions: If we can do it next week (May 5th through May 08), we will need only 4 days Monday through Thursday, System will be up at 4" on Friday May 9th . ( trust me, we know that is a short notice). The only other time will work for every one would be May 27th (start) and will need till June 3rd. During this time an overlay of 3 days needs to be ran without any distribution; it will push us into weekend but ASML crew has agreed to work during that time. So your suggestions and inputs are very important to us and I like to remind every one that the 3D installation is a major work and things of this nature is very common. So communicate with me ..... Mahnaz/Binder -------------- next part -------------- An HTML attachment was scrubbed... URL: From saraswat at cis.stanford.edu Wed Apr 30 17:48:59 2008 From: saraswat at cis.stanford.edu (Krishna Saraswat) Date: Wed, 30 Apr 2008 17:48:59 -0700 Subject: urgent update In-Reply-To: <4818A82E.9010902@stanford.edu> References: <4818A82E.9010902@stanford.edu> Message-ID: Hello Mahnaz, This is a crunch time for students feverishly working to get some results for the IEDM conference. Between ASML and Griffin it has become difficult for them to complete devices. I hear that griffin is again down. If ASML also goes out for another 4 days or more it puts a serious damper on their productivity. Can this be done during the quarter break when IEDM deadline is over and many students will take off for summer? Krishna --------- On Apr 30, 2008, at 10:11 AM, Mahnaz Mansourpour wrote: > Hello all, > > You need to read this carefully and give us feed back immediately.... > > Here are some facts: > > 3D front side went through and passed all the tests. > > Due to unexpected problems, ASML crew ran out of time to perform 3D > align calibrations for back side alignment.. > There is a time limit of less than a month for the installation of > the back side 3D, other wise both ( top and bottom ) needs to be > redo and tested and that would add easily 3-4 days more down time > to the system. > After the 3D installation completed , overlay tests (6" Wafers) > needs to be ran and etched in a different company ( needs to be > coordinated and scheduled with outsourcing company). > > Binder will be incharge with help of ASML crew so coordination is > the key. > This week May 28th we are already one week in to our less than a > month restriction. > > Suggestions: > > If we can do it next week (May 5th through May 08), we will need > only 4 days Monday through Thursday, System will be up at 4" on > Friday May 9th . ( trust me, we know that is a short notice). > > The only other time will work for every one would be May 27th > (start) and will need till June 3rd. During this time an overlay of > 3 days needs to be ran without any distribution; it will push us > into weekend but ASML crew has agreed to work during that time. > > So your suggestions and inputs are very important to us and I like > to remind every one that the 3D installation is a major work and > things of this nature is very common. > > So communicate with me ..... > > Mahnaz/Binder > >