asml wafers stuck -> can anyone help?

Onur Fidaner ofidaner at
Sat Apr 12 07:58:34 PDT 2008

Dear asml users,

Previous user's wafers were stuck in the tool at the most unfortunate time, apparently (Fri evening).  I was hoping to finish a process before the extended shutdown starting next Monday.  I would be glad if someone who is able to remove those wafers can come here today and take a look.

I would also be glad if we can try somewhat risky wafers when Gary is around.

Thank you very much,


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