mahnaz at stanford.edu
Fri Apr 25 17:12:28 PDT 2008
Asml crew are hard at work and I have been told that the system will be
up around 8ish this evening. Binder said that she has to run the
overlay wafer because the chuck has been changed so before they turn the
system to us this test has to be done.
The 3D upgrade did not go through and we need to schedule that for very
near future and most likely we need one week.
As soon as all the facts are known we will communicate with you.
More information about the asml