urgent update

Krishna Saraswat saraswat at cis.stanford.edu
Wed Apr 30 17:48:59 PDT 2008


Hello Mahnaz,

This is a crunch time for students feverishly working to get some  
results for the IEDM conference. Between ASML and Griffin it has  
become difficult for them to complete devices. I hear that griffin is  
again down. If ASML also goes out for another 4 days or more it puts a  
serious damper on their productivity. Can this be done during the  
quarter break when IEDM deadline is over and many students will take  
off for summer?

Krishna
---------


On Apr 30, 2008, at 10:11 AM, Mahnaz Mansourpour wrote:

> Hello all,
>
> You need to read this carefully and give us  feed back immediately....
>
> Here  are some facts:
>
> 3D front side went through and passed all the tests.
>
> Due to unexpected problems,  ASML crew ran out of time to perform 3D  
> align calibrations for back side alignment..
> There is a time limit of less than a month for the installation of  
> the back side 3D, other wise both ( top and bottom ) needs to be  
> redo and tested and that would add easily  3-4 days more down time  
> to the system.
> After the 3D installation completed , overlay tests (6" Wafers)  
> needs to be ran and etched in a different company  ( needs to be  
> coordinated and  scheduled with outsourcing company).
>
>  Binder will be incharge with  help of ASML crew  so coordination is  
> the key.
> This week May 28th  we are already one week in to our less than a  
> month restriction.
>
> Suggestions:
>
> If we can do it next week (May 5th through May 08),  we will need  
> only 4 days Monday through Thursday, System will be up at 4" on  
> Friday May 9th . ( trust me,  we know that  is a short notice).
>
> The only other time will work for every one would be May 27th  
> (start) and will need till June 3rd.  During this time an overlay of  
> 3 days needs to be ran  without any distribution; it will push us  
> into weekend but ASML crew has agreed to work during that time.
>
> So your suggestions and inputs are very important to us and I like  
> to remind every one that the 3D installation is a  major work and  
> things of this nature is very common.
>
> So communicate with me .....
>
> Mahnaz/Binder
>
>




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