exposure energy for spr220-7

Rostam Dinyari rostaamm at gmail.com
Fri Jun 6 13:14:57 PDT 2008


Hi,
I was wondering what the exposure energy is to try on matrix exposure for
spr220-7 for 7um thick resist.
Thanks,
Rostam
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/asml/attachments/20080606/f24f2fcc/attachment.html>


More information about the asml mailing list