binder.mann at asml.com
Mon Jun 9 11:02:36 PDT 2008
Good idea, we will update it what info we have so far.
From: Mahnaz Mansourpour [mailto:mahnaz at stanford.edu]
Sent: Friday, June 06, 2008 14:38
To: asml at snf.stanford.edu
Subject: Exposure sheet
I had few requests from members that they like to see an exposure sheet
for ASMl like the one we have for Nikon and other exposure tools. I
have made that and is in the Pink/lavender log sheet which has my name
on it and is on the table next to the tool. Please fill up the
information when you do substrate with different film or you use 220-7,
220-3 or 3617m, your peers will appreciate that.
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