etching ASML alignment marks using P5000

Kevin Huang kevhuang at
Fri Jun 27 15:45:43 PDT 2008

        Could anyone please tell me if there is a recipe for etching the
alignment marks for ASML on P5000?



Kevin Huang
Ph.D. Candidate
Stanford Organic Electronics Lab
Dept. of Electrical Engineering
Email: kevhuang at
Phone: (650) 725-6924
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