etching ASML alignment marks using P5000, AMT, & MRC

John Ross Jameson jameson at stanford.edu
Fri Jun 27 16:25:22 PDT 2008


Hi,

I'd also like to know if there's now a recipe for the AMT and/or MRC
etchers.

Thanks,
John

---------- Forwarded message ----------
Date: Fri, 27 Jun 2008 15:45:43 -0700
From: Kevin Huang <kevhuang at stanford.edu>
To: asml at snf.stanford.edu
Subject: etching ASML alignment marks using P5000

Hi,
        Could anyone please tell me if there is a recipe for etching the
alignment marks for ASML on P5000?

Thanks.

Kevin

==================================
Kevin Huang
Ph.D. Candidate
Stanford Organic Electronics Lab
Dept. of Electrical Engineering
Email: kevhuang at stanford.edu
Phone: (650) 725-6924
==================================




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