From nandasiri.samarakone at asml.com Thu May 1 14:46:21 2008 From: nandasiri.samarakone at asml.com (Nandasiri Samarakone) Date: Thu, 1 May 2008 17:46:21 -0400 Subject: Options in order to complete 3D install at Stanford In-Reply-To: Message-ID: <25C387066C812B47BBB8B617C867C377D2A6E0@USWILX85.sn-us.asml.com> In order to bring everyone up to speed, let me review the situation. A) ASML were unable to complete calibration of the 3D align in the time alloted. B) In order to finish we would need in the region of 4+ ( say 5 days for safety ) C) ASML have allready had the tool for several weeks for FLIR /AFFYMETRIX/ 3D INSTALL D) STANFORD students urgently need the tool in order to get results for the IEDM conference E) Binder and Paul have days off in May F) The longer we delay completion the greater the need to redo several tests ( ie we add 2 days ) G) I am unable to be present at Stanford Friday to discuss this 1 on 1 with Mary / Mahnaz / John etc due to prior comittments. The earliest time that I could realistically get there would be 3 pm. H) Suggest Binder discuss the following options with Mary / Mahnaz / John tomorrow Options in order of preference ( see attached power point ) 1. Take tool May 5, 6, 7, 8, 9 ( I understand this is unlikely as the students are way behind allready ) 2. Take the tool May 26, 27, 28, 29, and possibly Sat 30th 3. Take the tool June 2, 3, 4, 5, 6, 4. Take the tool June 23, 24, 25, 26, 27, ( although by now we would likely need to redo Red / Blue and other tests so that we would need 2 more days to complete the work. Ernie / John / Keith, Correct me if I am wrong but I don't see any scheduled 3D align project being impacted by any of the above options. Kind Regards Nanda -----Original Message----- From: Krishna Saraswat [mailto:saraswat at cis.stanford.edu] Sent: Wednesday, April 30, 2008 5:49 PM To: Mahnaz Mansourpour Cc: asml at snf.stanford.edu; Nandasiri Samarakone; shott at snf.stanford.edu; Mary Tang; Vilanova at snf.stanford.edu Subject: Re: urgent update Hello Mahnaz, This is a crunch time for students feverishly working to get some results for the IEDM conference. Between ASML and Griffin it has become difficult for them to complete devices. I hear that griffin is again down. If ASML also goes out for another 4 days or more it puts a serious damper on their productivity. Can this be done during the quarter break when IEDM deadline is over and many students will take off for summer? Krishna --------- On Apr 30, 2008, at 10:11 AM, Mahnaz Mansourpour wrote: > Hello all, > > You need to read this carefully and give us feed back immediately.... > > Here are some facts: > > 3D front side went through and passed all the tests. > > Due to unexpected problems, ASML crew ran out of time to perform 3D > align calibrations for back side alignment.. > There is a time limit of less than a month for the installation of the > back side 3D, other wise both ( top and bottom ) needs to be redo and > tested and that would add easily 3-4 days more down time to the > system. > After the 3D installation completed , overlay tests (6" Wafers) needs > to be ran and etched in a different company ( needs to be coordinated > and scheduled with outsourcing company). > > Binder will be incharge with help of ASML crew so coordination is > the key. > This week May 28th we are already one week in to our less than a > month restriction. > > Suggestions: > > If we can do it next week (May 5th through May 08), we will need only > 4 days Monday through Thursday, System will be up at 4" on Friday May > 9th . ( trust me, we know that is a short notice). > > The only other time will work for every one would be May 27th > (start) and will need till June 3rd. During this time an overlay of > 3 days needs to be ran without any distribution; it will push us into > weekend but ASML crew has agreed to work during that time. > > So your suggestions and inputs are very important to us and I like to > remind every one that the 3D installation is a major work and things > of this nature is very common. > > So communicate with me ..... > > Mahnaz/Binder > > -- The information contained in this communication and any attachments is confidential and may be privileged, and is for the sole use of the intended recipient(s). Any unauthorized review, use, disclosure or distribution is prohibited. Unless explicitly stated otherwise in the body of this communication or the attachment thereto (if any), the information is provided on an AS-IS basis without any express or implied warranties or liabilities. To the extent you are relying on this information, you are doing so at your own risk. If you are not the intended recipient, please notify the sender immediately by replying to this message and destroy all copies of this message and any attachments. ASML is neither liable for the proper and complete transmission of the information contained in this communication, nor for any delay in its receipt. -------------- next part -------------- A non-text attachment was scrubbed... Name: Available dates.bmp Type: image/bmp Size: 800310 bytes Desc: Available dates.bmp URL: From mtang at stanford.edu Thu May 15 14:06:53 2008 From: mtang at stanford.edu (Mary Tang) Date: Thu, 15 May 2008 14:06:53 -0700 Subject: ASML scheduled downtime - Plan change Message-ID: <482CA5ED.5050504@stanford.edu> Dear ASML users -- For various unavoidable logistic and technical issues, it is desirable order to avoid the extended 2-week downtime originally scheduled for the last week of June. Instead, the end of June shutdown will be shortened to one week. However, this requires a shutdown of three days in early June. The system is scheduled for shutdown on June 4, Wednesday morning, at 8 am. It will be converted to 6" to accommodate standard ASML calibration procedures for the new stage, installed a few weeks ago. The calibrations run continuously and iteratively, so the system will be unavailable during this time. The ASML engineers plan to complete calibrations and return the system to labmembers on 4" by 5 pm on Friday, June 6. We apologize for the inconvenience. For those of you facing an IEDM deadline, please get in touch with staff as soon as possible -- we will do what we can to facilitate your fabrication needs around this shutdown schedule. Thanks for your attention -- Mary -- Mary X. Tang, Ph.D. Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at stanford.edu http://snf.stanford.edu From caner at stanford.edu Mon May 19 10:26:30 2008 From: caner at stanford.edu (Caner Onal) Date: Mon, 19 May 2008 10:26:30 -0700 Subject: asml free 11am-12pm Message-ID: <98271E9A-00A7-4435-B847-272BF047D45C@stanford.edu> amtetcher is down so I won't be needing my asml time today. From garyyamanet at aim.com Mon May 19 14:46:46 2008 From: garyyamanet at aim.com (garyyamanet at aim.com) Date: Mon, 19 May 2008 17:46:46 -0400 Subject: finished early, free until 4pm Message-ID: <8CA8810F851E04C-1A34-20C8@webmail-nc03.sysops.aol.com> -------------- next part -------------- An HTML attachment was scrubbed... URL: From caner at stanford.edu Wed May 21 11:58:15 2008 From: caner at stanford.edu (Caner Onal) Date: Wed, 21 May 2008 11:58:15 -0700 Subject: asml reservation cancelled 12:30-1:30pm Message-ID: I don't need the asml today because the amt is still in shutdown. From masatoi at stanford.edu Wed May 21 13:48:53 2008 From: masatoi at stanford.edu (masatoi at stanford.edu) Date: Wed, 21 May 2008 13:48:53 -0700 Subject: asml reservation cancelled 14:00-15:00 In-Reply-To: References: Message-ID: <20080521134853.sidnaq7wso8gw804@webmail.stanford.edu> Sorry for late notice. From mahnaz at stanford.edu Thu May 22 15:21:00 2008 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Thu, 22 May 2008 15:21:00 -0700 Subject: down time Message-ID: <4835F1CC.9040406@stanford.edu> Hello all, I like to let everyone know that the system will be down on Wednesday 28th for 8 hours. Yesterday we did the hot spot test and Binder realized that the stone would not swing out fully, this is a major issue and need to be fixed as soon as possible. So the FSE scheduled on 28th. we like to start early but one person has reservation whom I will talk to. Wednesdays belong to ASML for 8 hours any way ( kind reminder). Please plan accordingly and let me know if there are any other issues. mahnaz From gsosa at stanford.edu Sun May 25 11:38:36 2008 From: gsosa at stanford.edu (Gary J Sosa) Date: Sun, 25 May 2008 11:38:36 -0700 Subject: ASM-L Stepper is Down Message-ID: <20080525113836.68nl4s7qs08g0g0k@webmail.stanford.edu> Hi ASM-L Users.... The stepper is down because of an unusual, loud mechanical banging sound when the tool is running. One of the labmembers noticed it when they were running the tool, and I also heard it while running the daily tests. I have shut the stepper down to prevent any further damage and will notify ASM-L early Tuesday morning. Sorry for the inconvenience. ...Gary From gsosa at stanford.edu Wed May 28 07:39:43 2008 From: gsosa at stanford.edu (Gary J Sosa) Date: Wed, 28 May 2008 07:39:43 -0700 Subject: ASM-L Stepper is Down In-Reply-To: <6.2.5.6.2.20080527165317.02e8f340@stanford.edu> References: <20080525113836.68nl4s7qs08g0g0k@webmail.stanford.edu> <6.2.5.6.2.20080527165317.02e8f340@stanford.edu> Message-ID: <20080528073943.8xen4mbhvogkg0g8@webmail.stanford.edu> Hi Al.... The replacement part is expected in on Thursday(Shipping from Veldhoven) and will be installed on that day. Today(Wednesday) ASM-L will continue with their planned activities of working on the "stone in/out" problem. ..Gary Quoting Ed Myers : > All, > > Any update on the parts delivery. We have some anxious lab members who > need to complete their processing by June 15th deadline. With the > upcoming scheduled 3-D qualification, they are especially anxious. > > Any update will be greatly appreciated. > > Thanks, > Ed > > At 11:38 AM 5/25/2008, Gary J Sosa wrote: >> Hi ASM-L Users.... >> >> The stepper is down because of an unusual, loud mechanical banging >> sound when the tool is running. One of the labmembers noticed it when >> they were running the tool, and I also heard it while running the >> daily tests. I have shut the stepper down to prevent any further >> damage and will notify ASM-L early Tuesday morning. Sorry for the >> inconvenience. >> >> ...Gary From mahnaz at stanford.edu Thu May 29 17:56:22 2008 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Thu, 29 May 2008 17:56:22 -0700 Subject: Up date Message-ID: <483F50B6.2030806@stanford.edu> Hello all, I am sorry to say that things did not go the way we all wished for!!. The Asml FSE encountered few issues and all the testing of the system will be done tomorrow morning. We are trying our best to bring the system up for the weekend. mahnaz From mahnaz at stanford.edu Fri May 30 19:07:45 2008 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Fri, 30 May 2008 19:07:45 -0700 Subject: ASML update Message-ID: <4840B2F1.2040708@stanford.edu> Hello all, FMC ( is the broken part) which has been replaced. Two boards were switched off by mistake and that caused some issues . Full Metrology test are done. Red/Blue tests, wafer stage test .Ran hot spot tests I ran few wafers with Paul, Linda and Michael's help. Please run a test wafer or even better Exposure / focus matrix and check things out. Please check back of your wafers for cleanliness and do not run anything unusual this weekend because if you do whole lot of people will hate you. If during the weekend things goes wrong Mary has the SNF cell phone call 650-521-7306 and she will communicate with ASML fse. Please if the system goes down 2 am wait till 8 am, no one can do anything at that time any way. Monday around 11:30 we need to change the lamp. Happy processing mahnaz From kevhuang at stanford.edu Sat May 31 09:38:58 2008 From: kevhuang at stanford.edu (Kevin Huang) Date: Sat, 31 May 2008 09:38:58 -0700 Subject: exposure time for 955 resist on Al Message-ID: <93586f8c0805310938q640fd495uaa4a2863a7eea484@mail.gmail.com> Hi, Could anyone tell me what a good starting exposure time is to try on matrix exposure for 955 resist on Al? Thanks. Kevin -- ================================== Kevin Huang Ph.D. Candidate Stanford Organic Electronics Lab Dept. of Electrical Engineering Email: kevhuang at stanford.edu Phone: (650) 725-6924 ================================== -------------- next part -------------- An HTML attachment was scrubbed... URL: