ASML scheduled downtime - Plan change

Mary Tang mtang at
Thu May 15 14:06:53 PDT 2008

Dear ASML users --

For various unavoidable logistic and technical issues, it is desirable 
order to avoid the extended 2-week downtime originally scheduled for the 
last week of June.  Instead, the end of June shutdown will be shortened 
to one week.  However, this requires a shutdown of three days in early June.

The system is scheduled for shutdown on June 4, Wednesday morning, at 8 
am.  It will be converted to 6" to accommodate standard ASML calibration 
procedures for the new stage, installed a few weeks ago.  The 
calibrations run continuously and iteratively, so the system will be 
unavailable during this time.  The ASML engineers plan to complete 
calibrations and return the system to labmembers on 4" by 5 pm on 
Friday, June 6.

We apologize for the inconvenience.  For those of you facing an IEDM 
deadline, please get in touch with staff as soon as possible -- we will 
do what we can to facilitate your fabrication needs around this shutdown 

Thanks for your attention --


Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
mtang at

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