ASM-L Stepper is Down
Gary J Sosa
gsosa at stanford.edu
Sun May 25 11:38:36 PDT 2008
Hi ASM-L Users....
The stepper is down because of an unusual, loud mechanical banging
sound when the tool is running. One of the labmembers noticed it when
they were running the tool, and I also heard it while running the
daily tests. I have shut the stepper down to prevent any further
damage and will notify ASM-L early Tuesday morning. Sorry for the
inconvenience.
...Gary
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