ASM-L Stepper is Down
Gary J Sosa
gsosa at stanford.edu
Wed May 28 07:39:43 PDT 2008
Hi Al....
The replacement part is expected in on Thursday(Shipping from
Veldhoven) and will be installed on that day. Today(Wednesday) ASM-L
will continue with their planned activities of working on the "stone
in/out" problem.
..Gary
Quoting Ed Myers <edmyers at stanford.edu>:
> All,
>
> Any update on the parts delivery. We have some anxious lab members who
> need to complete their processing by June 15th deadline. With the
> upcoming scheduled 3-D qualification, they are especially anxious.
>
> Any update will be greatly appreciated.
>
> Thanks,
> Ed
>
> At 11:38 AM 5/25/2008, Gary J Sosa wrote:
>> Hi ASM-L Users....
>>
>> The stepper is down because of an unusual, loud mechanical banging
>> sound when the tool is running. One of the labmembers noticed it when
>> they were running the tool, and I also heard it while running the
>> daily tests. I have shut the stepper down to prevent any further
>> damage and will notify ASM-L early Tuesday morning. Sorry for the
>> inconvenience.
>>
>> ...Gary
More information about the asml
mailing list