mahnaz at stanford.edu
Fri May 30 19:07:45 PDT 2008
FMC ( is the broken part) which has been replaced.
Two boards were switched off by mistake and that caused some issues .
Full Metrology test are done. Red/Blue tests, wafer stage test .Ran
hot spot tests
I ran few wafers with Paul, Linda and Michael's help.
Please run a test wafer or even better Exposure / focus matrix and
check things out.
Please check back of your wafers for cleanliness and do not run anything
unusual this weekend because if you do whole lot of people will hate you.
If during the weekend things goes wrong Mary has the SNF cell phone call
650-521-7306 and she will communicate with ASML fse.
Please if the system goes down 2 am wait till 8 am, no one can do
anything at that time any way.
Monday around 11:30 we need to change the lamp.
More information about the asml