From gsosa at stanford.edu Mon Nov 3 10:46:44 2008 From: gsosa at stanford.edu (Gary J Sosa) Date: Mon, 3 Nov 2008 10:46:44 -0800 (PST) Subject: ASML Stepper is Available Message-ID: <752878967.2518321225738004087.JavaMail.root@zm08.stanford.edu> Hi all... Todays staff coral reservations(Monday 11/3) on behalf of ASML have been removed. The stepper is up and available for use. ..Gary From paul.yick at asml.com Tue Nov 4 00:04:10 2008 From: paul.yick at asml.com (Paul Yick) Date: Tue, 4 Nov 2008 03:04:10 -0500 Subject: ASML Stepper is Available In-Reply-To: <752878967.2518321225738004087.JavaMail.root@zm08.stanford.edu> References: <752878967.2518321225738004087.JavaMail.root@zm08.stanford.edu> Message-ID: <4489817AA2A78647B9AB4B95305EEC560100A914@USWILX84.sn-us.asml.com> Dear ASML users, ASML won't be using the PAS5500/60 on Tuesday, 04-Nov-2008. Feel free to run your wafers on this tool. Regards, Paul -- The information contained in this communication and any attachments is confidential and may be privileged, and is for the sole use of the intended recipient(s). Any unauthorized review, use, disclosure or distribution is prohibited. Unless explicitly stated otherwise in the body of this communication or the attachment thereto (if any), the information is provided on an AS-IS basis without any express or implied warranties or liabilities. To the extent you are relying on this information, you are doing so at your own risk. If you are not the intended recipient, please notify the sender immediately by replying to this message and destroy all copies of this message and any attachments. ASML is neither liable for the proper and complete transmission of the information contained in this communication, nor for any delay in its receipt. From mahnaz at stanford.edu Wed Nov 12 17:01:24 2008 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Wed, 12 Nov 2008 17:01:24 -0800 Subject: Problem statement sheet Message-ID: <491B7C64.2020104@stanford.edu> Hello all, We have generated a problem statement sheet for ASML so when you encounter any problem ( mis alignment, wafers are not picked up by the system due to the process... pm marks are not working., expansion issue....etc) by answering some or all of the questions we might be able to help you quicker. I like to ask all of you to take a few minutes and read it and make comments if you like. I will put a hard copy of it in the binder next to the tool tomorrow and you will have the email format of it if ever needed. mahnaz -------------- next part -------------- A non-text attachment was scrubbed... Name: asml problem Definition Form-1.ppt Type: application/vnd.ms-powerpoint Size: 114688 bytes Desc: not available URL: From mahnaz at stanford.edu Thu Nov 13 15:54:45 2008 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Thu, 13 Nov 2008 15:54:45 -0800 Subject: Pm Message-ID: <491CBE45.6080109@stanford.edu> Hello all Just to let you know that asml fse will do monthly pm on the system next Wednesday November 18th. mahnaz From mahnaz at stanford.edu Fri Nov 14 09:17:11 2008 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Fri, 14 Nov 2008 09:17:11 -0800 Subject: Scribe wafers Message-ID: <491DB297.40203@stanford.edu> Hello all, Although during training I tell you not to scribe your wafers on the back still we see so many wafers are scribed on the back and with large letters and numbers. Wafers with scratches and scribe on the back can not be ran on ASML. When the wafers get stranded on the tool and the tools goes down is plain EXPENSIVE. Is expensive time and resource wise, is expensive for ASML as well. *From now on if the wafers get stuck in the system and the reason was because of scribe, scratch, scum on the back of wafers or the wafer is not flat .....You have forced me to take your name of the tool.* Please if there is a matter of training or anything come and see me./ * mahnaz * / From johan at andreasson.com Mon Nov 17 09:54:25 2008 From: johan at andreasson.com (Johan Andreasson) Date: Mon, 17 Nov 2008 09:54:25 -0800 Subject: ASML released Message-ID: <4921AFD1.4030904@andreasson.com> ASML is free 10-11 and 13-14. Wafers not ready. --Johan From mahnaz at stanford.edu Wed Nov 19 17:48:31 2008 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Wed, 19 Nov 2008 17:48:31 -0800 Subject: DOWN Message-ID: <4924C1EF.3020009@stanford.edu> Hello all, Stepper will be down tonight due to stone image tilt which is out of spec. We have to apologize but I promise that i will look in to this matter. mahnaz/ Gary/Linda From gsosa at stanford.edu Thu Nov 20 16:34:29 2008 From: gsosa at stanford.edu (Gary J Sosa) Date: Thu, 20 Nov 2008 16:34:29 -0800 (PST) Subject: Stepper Update Message-ID: <1069284895.154961227227669941.JavaMail.root@zm08.stanford.edu> Hello Stepper Users- I am sorry to report that the stepper will not be up tonight. The problem with the stone swinging in and out has been resolved. However, the tool was open for an extended period of time and needs to stabilize before any metrology and baseline setups can be performed. The testing and setups will begin early tomorrow morning and we hope to have the system up by the end of the day. Many apologies for the extended downtime. ...Gary From gsosa at stanford.edu Fri Nov 21 16:13:37 2008 From: gsosa at stanford.edu (Gary J Sosa) Date: Fri, 21 Nov 2008 16:13:37 -0800 (PST) Subject: Stepper is back up! Message-ID: <240061893.443471227312817874.JavaMail.root@zm08.stanford.edu> Hello ASML Users- THe ASML Stepper is back up. The PM is completed and stone in/out problems resolved. The tool is stable and all baseline setups have been done, including 3D aligh setup and testing. If you encounter any problems, please report them in Coral. Thanks.. Gary From gsosa at stanford.edu Fri Nov 21 18:30:55 2008 From: gsosa at stanford.edu (Gary J Sosa) Date: Fri, 21 Nov 2008 18:30:55 -0800 (PST) Subject: The Stepper is Down!! Message-ID: <28835574.462841227321055002.JavaMail.root@zm08.stanford.edu> Sorry folks. THe stepper is still down. We had 2 users expose wafers that came out mis-aligned. The mis-alignment appears to be rotation. I have contacted ASML and am waiting for Chris to arrive tonight to try and resolve the alignment issues. Please keep an eye on Coral for further updates. ... Gary From gsosa at stanford.edu Fri Nov 21 22:26:12 2008 From: gsosa at stanford.edu (Gary J Sosa) Date: Fri, 21 Nov 2008 22:26:12 -0800 (PST) Subject: THe Stepper is back up!! In-Reply-To: <182336465.477271227334478421.JavaMail.root@zm08.stanford.edu> Message-ID: <1301390315.477511227334754690.JavaMail.root@zm08.stanford.edu> Hello ASM-L Stepper Users.. The stepper is back up and ready to use. Chris from ASML came in and Checked/updated "Basic Machine Constants" for front and backside alignment to correct mis-alignment problems. We verified the alignment( Front and 3D align) by exposing / developing and inspecting wafers provided by Joey Doll. All alignment looked good. Thanks Chris and Joey for helping us through this delemma. We will continue to monitor the stepper over the weekend and make every effort to keep it running, so please report any issues that you encounter in Coral. Thanks and sorry for the inconvenience. ...Gary From gsosa at stanford.edu Fri Nov 21 22:27:23 2008 From: gsosa at stanford.edu (Gary J Sosa) Date: Fri, 21 Nov 2008 22:27:23 -0800 (PST) Subject: THe Stepper is back up!! In-Reply-To: <1037759498.477711227335088609.JavaMail.root@zm08.stanford.edu> Message-ID: <1813559390.477951227335243484.JavaMail.root@zm08.stanford.edu> Hello ASM-L Stepper Users.. The stepper is back up and ready to use. Chris from ASML came in and Checked/updated "Basic Machine Constants" for front and backside alignment to correct mis-alignment problems. We verified the alignment( Front and 3D align) by exposing / developing and inspecting wafers provided by Joey Doll. All alignment looked good. Thanks Chris and Joey for helping us through this delemma. We will continue to monitor the stepper over the weekend and make every effort to keep it running, so please report any issues that you encounter in Coral. Thanks and sorry for the inconvenience. ...Gary From shuluc at stanford.edu Mon Nov 24 15:54:30 2008 From: shuluc at stanford.edu (Shu-Lu Chen) Date: Mon, 24 Nov 2008 15:54:30 -0800 (PST) Subject: :ASML 17:30 to 18:30 released In-Reply-To: <4921AFD1.4030904@andreasson.com> Message-ID: <1008186935.579251227570870645.JavaMail.root@zm06.stanford.edu> Sample will not be ready by then. Sorry for late notice From cwan at stanford.edu Mon Nov 24 15:59:50 2008 From: cwan at stanford.edu (ChungChun Wan) Date: Mon, 24 Nov 2008 15:59:50 -0800 (PST) Subject: :ASML 17:30 to 18:30 released In-Reply-To: <1008186935.579251227570870645.JavaMail.root@zm06.stanford.edu> Message-ID: <438393614.611971227571190317.JavaMail.root@zm03.stanford.edu> I will take it. Thanks, ccwan ----- Original Message ----- From: "Shu-Lu Chen" To: asml at snf.stanford.edu Sent: Monday, November 24, 2008 3:54:30 PM GMT -08:00 US/Canada Pacific Subject: :ASML 17:30 to 18:30 released Sample will not be ready by then. Sorry for late notice