Gary J Sosa
gsosa at stanford.edu
Thu Nov 20 16:34:29 PST 2008
Hello Stepper Users-
I am sorry to report that the stepper will not be up tonight. The problem with the stone swinging in and out has been resolved. However, the tool was open for an extended period of time and needs to stabilize before any metrology and baseline setups can be performed. The testing and setups will begin early tomorrow morning and we hope to have the system up by the end of the day. Many apologies for the extended downtime.
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