Stepper is back up!

Gary J Sosa gsosa at stanford.edu
Fri Nov 21 16:13:37 PST 2008


Hello ASML Users-

   THe ASML Stepper is back up. The PM is completed and stone in/out problems resolved. The tool is stable and all baseline setups have been done, including 3D aligh setup and testing. If you encounter any problems, please report them in Coral.

   Thanks.. Gary 



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