The Stepper is Down!!

Gary J Sosa gsosa at stanford.edu
Fri Nov 21 18:30:55 PST 2008


 Sorry folks. THe stepper is still down. We had 2 users expose wafers that came out mis-aligned. The mis-alignment appears to be rotation. I have contacted ASML and am waiting for Chris to arrive tonight to try and resolve the alignment issues. Please keep an eye on Coral for further updates.

  ... Gary



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